國立虎尾科技大學 |

Characterization of a CMUT Array.

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Characterization of a CMUT Array./
作者:	Zure, Tugrul.
面頁冊數:	108 p.
附註:	Source: Masters Abstracts International, Volume: 50-04, page: 2602.
Contained By:	Masters Abstracts International50-04.
標題:	Engineering, Automotive. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=MR76227
ISBN:	9780494762271

Characterization of a CMUT Array.
Zure, Tugrul.

Characterization of a CMUT Array. - 108 p.

Source: Masters Abstracts International, Volume: 50-04, page: 2602.

Thesis (M.Sc.)--University of Windsor (Canada), 2012.

Ultrasound transducers are used in a broad range of applications covering from underwater communications to medical imaging and treatment. The ultrasonic transducer determines the key specifications such as resolution, sensitivity and signal to noise ratio. The capacitive micromachined ultrasonic transducer (CMUT) has emerged as an alternative to standard piezoelectric transducers due to advanced microelectronics fabrication technology and methods. Comparing to piezoelectric transducers, the CMUT is superior to it's competitor with higher acoustic bandwidth, higher sensitivity and greater coupling with the acoustic medium. Design, fabrication, and characterization of a capacitive micromachined ultrasonic transducer (CMUT) array have been presented along this thesis. The array is designed to operate in the frequency range of 113--167 kHz. The CMUT array is fabricated using an SOI based fabrication technology and includes 6x6 CMUTs. Necessary test setups and readout circuitry is designed in order to carry out the characterization process. Static analysis results are verified with Wyko(TM) optical profilometer, Agilent(TM) LCR meter and SEM analysis. Dynamic characterizations are done with Polytec(TM) MSA-4 laser Doppler vibrometer. An efficient and low noise capacitive readout circuit is designed using transimpedance amplifier scheme with 75 kilo ohm gain and fabricated on a PCB. The developed analytical models, FEA and experimental results are in very good agreement to exhibit accuracy of the design methodology.

ISBN: 9780494762271Subjects--Topical Terms:

845411
Engineering, Automotive.

Characterization of a CMUT Array.
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500 $a Source: Masters Abstracts International, Volume: 50-04, page: 2602.
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502 $a Thesis (M.Sc.)--University of Windsor (Canada), 2012.
520 $a Ultrasound transducers are used in a broad range of applications covering from underwater communications to medical imaging and treatment. The ultrasonic transducer determines the key specifications such as resolution, sensitivity and signal to noise ratio. The capacitive micromachined ultrasonic transducer (CMUT) has emerged as an alternative to standard piezoelectric transducers due to advanced microelectronics fabrication technology and methods. Comparing to piezoelectric transducers, the CMUT is superior to it's competitor with higher acoustic bandwidth, higher sensitivity and greater coupling with the acoustic medium. Design, fabrication, and characterization of a capacitive micromachined ultrasonic transducer (CMUT) array have been presented along this thesis. The array is designed to operate in the frequency range of 113--167 kHz. The CMUT array is fabricated using an SOI based fabrication technology and includes 6x6 CMUTs. Necessary test setups and readout circuitry is designed in order to carry out the characterization process. Static analysis results are verified with Wyko(TM) optical profilometer, Agilent(TM) LCR meter and SEM analysis. Dynamic characterizations are done with Polytec(TM) MSA-4 laser Doppler vibrometer. An efficient and low noise capacitive readout circuit is designed using transimpedance amplifier scheme with 75 kilo ohm gain and fabricated on a PCB. The developed analytical models, FEA and experimental results are in very good agreement to exhibit accuracy of the design methodology.
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790 1 0 $a Muscedere, Roberto $e committee member
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