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Ionized physical vapor deposition

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Hopwood, Jeffrey A.

Ionized physical vapor deposition

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Ionized physical vapor deposition/ edited by Jeffrey A. Hopwood.
other author:	Hopwood, Jeffrey A.
Published:	San Diego :Academic Press, : c2000.,
Description:	1 online resource (xii, 253 p.) :ill. :
Subject:	Thin film devices - Design and construction. -
Online resource:	http://www.sciencedirect.com/science/book/9780125330275
ISBN:	9780125330275

Ionized physical vapor deposition
Ionized physical vapor deposition[electronic resource] /edited by Jeffrey A. Hopwood. - San Diego :Academic Press,c2000. - 1 online resource (xii, 253 p.) :ill. - Thin films ;v. 27. - Thin films (San Diego, Calif.) ;v. 27..

Includes bibliographical references and indexes.

ISBN: 9780125330275Subjects--Topical Terms:

874021
Thin film devices
--Design and construction.

LC Class. No.: QC176.A1 / P53 vol.27eb

Dewey Class. No.: 621.3815/2

Ionized physical vapor deposition
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008 130128s2000 caua ob 001 0 eng d
020 $a 9780125330275
020 $a 0125330278
035 $a ocn162128928
050 4 $a QC176.A1 $b P53 vol.27eb
082 0 4 $a 621.3815/2 $2 22
245 0 0 $a Ionized physical vapor deposition $h [electronic resource] / $c edited by Jeffrey A. Hopwood.
260 $a San Diego : $b Academic Press, $c c2000.
300 $a 1 online resource (xii, 253 p.) : $b ill.
490 1 $a Thin films ; $v v. 27
504 $a Includes bibliographical references and indexes.
588 $a Description based on print version record.
650 0 $a Thin film devices $x Design and construction. $3 874021
650 0 $a Physical vapor deposition. $3 874022
650 0 $a Thin films. $3 560219
700 1 $a Hopwood, Jeffrey A. $3 874019
830 0 $a Thin films (San Diego, Calif.) ; $v v. 27. $3 874020
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9780125330275

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