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Handbook of chemical vapor depostion...

Pierson, Hugh O.

Handbook of chemical vapor depostion [i.e. deposition] (CVD) = principles, technology, and applications /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Handbook of chemical vapor depostion [i.e. deposition] (CVD)/ by Hugh O. Pierson.
Reminder of title:	principles, technology, and applications /
remainder title:	Handbook of chemical vapor deposition
Author:	Pierson, Hugh O.
other author:	Pierson, Hugh O.
Published:	Norwich, N.Y. :Noyes Publications/William Andrew Pub., : c1999.,
Description:	1 online resource (xxiv, 482 p.) :ill. :
Notes:	Rev. ed. of: Handbook of chemical vapor deposition (CVD), c1992.
Subject:	Chemical vapor deposition - Handbooks, manuals, etc. -
Online resource:	http://www.sciencedirect.com/science/book/9780815514329
ISBN:	9780815514329

Handbook of chemical vapor depostion [i.e. deposition] (CVD) = principles, technology, and applications /
Pierson, Hugh O.

Handbook of chemical vapor depostion [i.e. deposition] (CVD)principles, technology, and applications /[electronic resource] :Handbook of chemical vapor depositionby Hugh O. Pierson. - 2nd ed. - Norwich, N.Y. :Noyes Publications/William Andrew Pub.,c1999. - 1 online resource (xxiv, 482 p.) :ill. - Materials science and process technology series. - Materials science and process technology series..

Rev. ed. of: Handbook of chemical vapor deposition (CVD), c1992.

Includes bibliographical references and index.

ISBN: 9780815514329Subjects--Topical Terms:

873940
Chemical vapor deposition
--Handbooks, manuals, etc.

LC Class. No.: TS695 / .P52 1999eb

Dewey Class. No.: 671.7/35

Handbook of chemical vapor depostion [i.e. deposition] (CVD) = principles, technology, and applications /
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100 1 $a Pierson, Hugh O. $3 874094
245 1 0 $a Handbook of chemical vapor depostion [i.e. deposition] (CVD) $h [electronic resource] : $b principles, technology, and applications / $c by Hugh O. Pierson.
246 1 8 $a Handbook of chemical vapor deposition
250 $a 2nd ed.
260 $a Norwich, N.Y. : $b Noyes Publications/William Andrew Pub., $c c1999.
300 $a 1 online resource (xxiv, 482 p.) : $b ill.
490 1 $a Materials science and process technology series
500 $a Rev. ed. of: Handbook of chemical vapor deposition (CVD), c1992.
504 $a Includes bibliographical references and index.
588 $a Description based on print version record.
650 0 $a Chemical vapor deposition $v Handbooks, manuals, etc. $3 873940
650 0 $a Vapor-plating $v Handbooks, manuals, etc. $3 874096
700 1 $a Pierson, Hugh O. $3 874094
830 0 $a Materials science and process technology series. $3 874095
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9780815514329

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