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Optical scattering = measurement and analysis /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Optical scattering/ John C. Stover.
其他題名:	measurement and analysis /
作者:	Stover, John C.
出版者:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :SPIE, : c1995.,
面頁冊數:	1 online resource (xiii, 321 p. : ill.) :digital file. :
附註:	"SPIE digital library."
標題:	Light - Scattering. -
電子資源:	http://dx.doi.org/10.1117/3.203079
ISBN:	9780819478443 (electronic)

Optical scattering = measurement and analysis /
Stover, John C.

Optical scatteringmeasurement and analysis /[electronic resource] :John C. Stover. - 2nd ed. - Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :SPIE,c1995. - 1 online resource (xiii, 321 p. : ill.) :digital file. - SPIE Press monograph ;PM24. - SPIE Press monograph ;PM103..

"SPIE digital library."

Includes bibliographical references (p. 303-317) and index.

Chapter 1. Introduction to light scatter: 1.1 The scattering of light -- 1.2 Scatter from a smooth sinusoidal surface -- 1.3 Scatter from other surfaces -- 1.4 Scatter from windows and particulates -- 1.5 Bidirectional scatter distribution functions -- 1.6 Total integrated scatter -- 1.7 Summary.

Restricted to subscribers or individual electronic text purchasers.

As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable.

System requirements: Adobe Acrobat Reader.

ISBN: 9780819478443 (electronic)

Standard No.: 10.1117/3.203079doiSubjects--Topical Terms:

639771
Light
--Scattering.

LC Class. No.: QC427.4 / .S76 1995e

Dewey Class. No.: 535/.4

Optical scattering = measurement and analysis /
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035 $a 9780819478443
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050 4 $a QC427.4 $b .S76 1995e
082 0 0 $a 535/.4 $2 20
100 1 $a Stover, John C. $3 877206
245 1 0 $a Optical scattering $h [electronic resource] : $b measurement and analysis / $c John C. Stover.
250 $a 2nd ed.
260 $a Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : $b SPIE, $c c1995.
300 $a 1 online resource (xiii, 321 p. : ill.) : $b digital file.
490 1 $a SPIE Press monograph ; $v PM24
500 $a "SPIE digital library."
504 $a Includes bibliographical references (p. 303-317) and index.
505 0 $a Chapter 1. Introduction to light scatter: 1.1 The scattering of light -- 1.2 Scatter from a smooth sinusoidal surface -- 1.3 Scatter from other surfaces -- 1.4 Scatter from windows and particulates -- 1.5 Bidirectional scatter distribution functions -- 1.6 Total integrated scatter -- 1.7 Summary.
505 0 $a Chapter 2. Surface roughness: 2.1 Profile characterization -- 2.2 The surface power spectral-- Density and autocovariance functions -- 2.3 Summary.
505 0 $a Chapter 3. Scatter calculations and diffraction theory: 3.1. Overview -- 3.2. Kirchhoff diffraction theory -- 3.3. The Rayleigh approach -- 3.4. Comparison of vector and scalar results -- 3.5. Summary.
505 0 $a Chapter 4. Calculation of smooth-surface statistics from the BRDF: 4.1. Practical application of the Rayleigh-Rice perturbation theory -- 4.2. Roughness statistics of isotropic surfaces -- 4.3. Roughness statistics of one-dimensional surfaces -- 4.4. Roughness statistics for the general case -- 4.5. The K-correlation surface power spectrum models -- 4.6. The TIS derivation from the Rayleigh-Rice perturbation theory -- 4.7. Summary.
505 0 $a Chapter 5. Polarization of scattered light: 5.1. A review of polarization concepts -- 5.2. The polarization factor Q -- 5.3. Scattering vectors and matrices -- 5.4. Summary.
505 0 $a Chapter 6. Scatter measurements and instrumentation: 6.1. Scatterometer components -- 6.2. Instrument signature -- 6.3. Aperture effects on the measured BSDF -- 6.4. Signature reduction and near-specular measurements -- 6.5. The noise-equivalent BSDF -- 6.6. Measurement of P. and instrument calibration -- 6.7. Measurement of curved optics -- 6.8. Coordinate systems and out-of-plane measurements -- 6.9. Raster scans -- 6.10. Measurement of retroreflection -- 6.11. Alternate TIS devices -- 6.12. Error analysis of the measured BSDF -- 6.13. Summary.
505 0 $a Chapter 7. Scatter predictions: 7.1. Optical surfaces: using the Rayleigh-Rice equation -- 7.2. Rough surfaces -- 7.3. Partial data sets -- 7.4. Scatter from diffuse samples -- 7.5. BRDF standard surfaces -- 7.6. Software for prediction of scatter in optical systems -- 7.7. Summary.
505 0 $a Chapter 8. Detection of Discrete Surface and Subsurface Defects: 8.1. Polarization effects associated with defect scatter -- 8.2. Bulk defects in transparent optics -- 8.3. Near-point-scatter sources and differential-scattering cross section -- 8.4. Nontopographic defects in opaque materials -- 8.5. Summary.
505 0 $a Chapter 9. Industrial applications: 9.1 Semiconductor applications -- 9.2. Computer disks -- 9.3. Contamination measurement by wavelength discrimination -- 9.4. General manufacturing examples -- 9.5. Summary.
505 0 $a Chapter 10. Scatter specifications: 10.1 Generic specifications -- 10.2. Calculation of specifications for several examples -- 10.3. Summary -- Appendix A. Review of electromagnetic wave propagation -- A. 1 The wave equation -- A.2 Electromagnetic plane waves in free space -- A.3 Plane waves in a dielectric -- A.4 Plane waves.in a conducting medium -- Appendix B. Kirchhoff diffraction from sinusoidal gratings -- Appendix C. BSDF data -- Bibliography -- Index.
506 $a Restricted to subscribers or individual electronic text purchasers.
520 $a As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable.
530 $a Also available in print version.
538 $a System requirements: Adobe Acrobat Reader.
538 $a Mode of access: World Wide Web.
650 0 $a Light $x Scattering. $3 639771
710 2 $a Society of Photo-optical Instrumentation Engineers. $3 700253
830 0 $a SPIE Press monograph ; $v PM103. $3 877204
856 4 0 $u http://dx.doi.org/10.1117/3.203079