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Fundamentals of semiconductor manufacturing and process control

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Fundamentals of semiconductor manufacturing and process control/ Gary S. May, Costas J. Spanos.
Author:	May, Gary S.
other author:	Spanos, Costas J.
Published:	[Piscataway] :IEEE ; : c2006.,
Description:	1 online resource (xix, 463 p.) :ill. :
Subject:	Semiconductors - Design and construction. -
Online resource:	http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952
ISBN:	0471784060 (cloth : alk. paper)

Fundamentals of semiconductor manufacturing and process control
May, Gary S.

Fundamentals of semiconductor manufacturing and process control[electronic resource] /Gary S. May, Costas J. Spanos. - [Piscataway] :IEEE ;c2006. - 1 online resource (xix, 463 p.) :ill.

Includes bibliographical references and index.

Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.

"Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modelling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts." "Graduate-level students and industrial practitioners will benefit from the detailed examination of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment."--Jacket.

ISBN: 0471784060 (cloth : alk. paper)

Standard No.: 10.1002/0471790281doi

Knovel Corporationhttp://www.knovel.com

Nat. Bib. No.: GBA627486bnb

UkSubjects--Topical Terms:

599469
Semiconductors
--Design and construction.Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7871.85 / .M379 2006

Dewey Class. No.: 621.3815/2

Fundamentals of semiconductor manufacturing and process control
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