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Substrate surface preparation handbook /

~

Robertson, Max, (1942-)

Substrate surface preparation handbook /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Substrate surface preparation handbook // Max Robertson.
Author:	Robertson, Max,
Published:	Boston :Artech House, : c2012.,
Description:	195 p. :ill. ; : 24 cm.;
Subject:	Semiconductors - Surfaces. -
ISBN:	9781608072132 :

Substrate surface preparation handbook /
Robertson, Max,1942-

Substrate surface preparation handbook /Max Robertson. - Boston :Artech House,c2012. - 195 p. :ill. ;24 cm. - Artech House applied photonics series.

Includes bibliographical references and index.

ISBN: 9781608072132 :NT3584

LCCN: 2011276683

Nat. Bib. No.: GBB2B9129bnbSubjects--Topical Terms:

903654
Semiconductors
--Surfaces.

LC Class. No.: QC611.S9 / R56 2012

Dewey Class. No.: 621.3815

Substrate surface preparation handbook /
LDR:00710cam a2200241 a 4500 001 752146
005 20130718102206.0
008 130801s2012 maua erb 001 0 eng d
010 $a 2011276683
015 $a GBB2B9129 $2 bnb
020 $a 9781608072132 : $c NT3584
020 $a 1608072134
035 $a (OCoLC)ocn768130712
035 $a 00039159
040 $a VYR $c VYR $d DLC $d Uk $d NFU
041 0 # $a eng
042 $a ukblsr
050 0 0 $a QC611.S9 $b R56 2012
082 0 4 $a 621.3815 $2 23
100 1 $a Robertson, Max, $d 1942- $3 910147
245 1 0 $a Substrate surface preparation handbook / $c Max Robertson.
260 # $a Boston : $c c2012. $b Artech House,
300 $a 195 p. : $b ill. ; $c 24 cm.
490 0 $a Artech House applied photonics series
504 $a Includes bibliographical references and index.
650 # 0 $a Semiconductors $x Surfaces. $3 903654
650 # 0 $a Epitaxy. $3 901803

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E039159

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621.3815 R649 2012

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