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Characterization in compound semicon...
~
McGuire, G. E.
Characterization in compound semiconductor processing /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Characterization in compound semiconductor processing // editors, Yale Strausser and Gary E. McGuire.
其他題名:
Compound semiconductor processing.
其他作者:
McGuire, G. E.
出版者:
New York :Momentum Press, : 2010.,
面頁冊數:
xvi, 199 p. :ill. ; : 25 cm.;
附註:
"First published by Butterworth-Heinemann in 1995 ... Reissued volume published in 2010 by Momentum Press."--T.p. verso.
標題:
Compound semiconductors - Surfaces. -
ISBN:
9781606500415 (cloth) :
Characterization in compound semiconductor processing /
Characterization in compound semiconductor processing /
Compound semiconductor processing.editors, Yale Strausser and Gary E. McGuire. - New York :Momentum Press,2010. - xvi, 199 p. :ill. ;25 cm. - Materials characterization series.
"First published by Butterworth-Heinemann in 1995 ... Reissued volume published in 2010 by Momentum Press."--T.p. verso.
Includes bibliographical references and index.
Characterization of III-V thin films for electronic devices -- III-V compound semiconductor films for optical applications -- Contacts -- Dielectric insulating layers -- Other compound semiconductor films -- Deep level sransient spectroscopy: a case study on GaAs -- Appendix: Technique summaries.
"Characterization in Compound Semiconductor Processing is for scientists and engineers working with compound semiconductor materials and devices who are not characterization specialists. Materials and processes typically used in R&D and in the fabrication of GaAs, GaA1As, InP and HgCdTe based devices provide examples of common analytical problems. The book discusses a variety of characterization techniques to provide insight into how each individually, or in combination, might be used in solving problems associated with these materials. The book will help in the selection and application of the appropriate analytical techniques by its coverage of all stages of materials or device processing: substrate preparation, epitaxial growth, dielectric film deposition, contact formation and dopant introduction."--P. [4] of cover.
ISBN: 9781606500415 (cloth) :NT2968Subjects--Topical Terms:
915240
Compound semiconductors
--Surfaces.
LC Class. No.: QC611.8.C64 / C48 2010
Dewey Class. No.: 621.3815/2
Characterization in compound semiconductor processing /
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