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Optical diagnostics for thin film pr...

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Herman, Irving P.

Optical diagnostics for thin film processing

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Optical diagnostics for thin film processing/ Irving P. Herman.
Author:	Herman, Irving P.
Published:	San Diego, CA :Academic Press, : c1996.,
Description:	xxix, 783 p. :ill. ; : 24 cm.;
Subject:	Spectrum analysis - Industrial applications. -
Online resource:	http://www.sciencedirect.com/science/book/9780123420701
ISBN:	9780123420701 (electronic bk.)

Optical diagnostics for thin film processing
Herman, Irving P.

Optical diagnostics for thin film processing[electronic resource] /Irving P. Herman. - San Diego, CA :Academic Press,c1996. - xxix, 783 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780123420701 (electronic bk.)

LCCN: 95016540 Subjects--Topical Terms:

906863
Spectrum analysis
--Industrial applications.

LC Class. No.: QC176.84.S93 / H47 1996

Dewey Class. No.: 621.3815/2/0287

Optical diagnostics for thin film processing
LDR:00695cam a2200205 a 45 001 776965
005 20131126174109.0
008 140224s1996 caua sb 001 0 eng
010 $a 95016540
020 $a 9780123420701 (electronic bk.)
020 $a 9780123420701
035 $a 13000351
040 $a DLC $c DLC $d DLC
041 0 $a eng
050 0 0 $a QC176.84.S93 $b H47 1996
082 0 0 $a 621.3815/2/0287 $2 20
100 1 $a Herman, Irving P. $3 906862
245 1 0 $a Optical diagnostics for thin film processing $h [electronic resource] / $c Irving P. Herman.
260 $a San Diego, CA : $b Academic Press, $c c1996.
300 $a xxix, 783 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Spectrum analysis $x Industrial applications. $3 906863
650 0 $a Thin films $x Surfaces. $3 856941
856 4 0 $u http://www.sciencedirect.com/science/book/9780123420701

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