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PVD for microelectronics = sputter d...

Rossnagel, Stephen M.

PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	PVD for microelectronics/ Ronald A. Powell, Stephen M. Rossnagel.
其他題名:	sputter deposition applied to semiconductor manufacturing /
作者:	Powell, Ronald A.
其他作者:	Rossnagel, Stephen M.
出版者:	San Diego :Academic Press, : c1999.,
面頁冊數:	xiii, 419 p. :ill. ; : 24 cm.;
標題:	Thin film devices - Design and construction. -
電子資源:	http://www.sciencedirect.com/science/book/9780125330268
ISBN:	9780125330268 (electronic bk.)

PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /
Powell, Ronald A.

PVD for microelectronicssputter deposition applied to semiconductor manufacturing /[electronic resource] :Ronald A. Powell, Stephen M. Rossnagel. - San Diego :Academic Press,c1999. - xiii, 419 p. :ill. ;24 cm. - Thin films ;v. 26 . - Thin films (San Diego, Calif.) ;v. 27..

Includes bibliographical references and indexes.

ISBN: 9780125330268 (electronic bk.) Subjects--Topical Terms:

874021
Thin film devices
--Design and construction.

LC Class. No.: QC176.A1 / P53 v.26

Dewey Class. No.: 621.3815/2

PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /
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245 1 0 $a PVD for microelectronics $h [electronic resource] : $b sputter deposition applied to semiconductor manufacturing / $c Ronald A. Powell, Stephen M. Rossnagel.
260 $a San Diego : $b Academic Press, $c c1999.
300 $a xiii, 419 p. : $b ill. ; $c 24 cm.
490 1 $a Thin films ; $v v. 26
504 $a Includes bibliographical references and indexes.
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830 0 $a Thin films (San Diego, Calif.) ; $v v. 27. $3 874020
856 4 0 $u http://www.sciencedirect.com/science/book/9780125330268

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