Atomic layer deposition for semicond...
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  • Atomic layer deposition for semiconductors
  • Record Type: Language materials, printed : Monograph/item
    Title/Author: Atomic layer deposition for semiconductors/ edited by Cheol Seong Hwang.
    other author: Seong Hwang, Cheol.
    Published: Boston, MA :Springer US : : 2014.,
    Description: x, 263 p. :ill., digital ; : 24 cm.;
    Contained By: Springer eBooks
    Subject: Semiconductors - Surfaces. -
    Online resource: http://dx.doi.org/10.1007/978-1-4614-8054-9
    ISBN: 9781461480549 (electronic bk.)
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