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Atomic layer deposition for semicond...
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SpringerLink (Online service)
Atomic layer deposition for semiconductors
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Atomic layer deposition for semiconductors/ edited by Cheol Seong Hwang.
other author:
Seong Hwang, Cheol.
Published:
Boston, MA :Springer US : : 2014.,
Description:
x, 263 p. :ill., digital ; : 24 cm.;
Contained By:
Springer eBooks
Subject:
Semiconductors - Surfaces. -
Online resource:
http://dx.doi.org/10.1007/978-1-4614-8054-9
ISBN:
9781461480549 (electronic bk.)
Atomic layer deposition for semiconductors
Atomic layer deposition for semiconductors
[electronic resource] /edited by Cheol Seong Hwang. - Boston, MA :Springer US :2014. - x, 263 p. :ill., digital ;24 cm.
ISBN: 9781461480549 (electronic bk.)Subjects--Topical Terms:
903654
Semiconductors
--Surfaces.
Dewey Class. No.: 621.38152
Atomic layer deposition for semiconductors
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edited by Cheol Seong Hwang.
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Imprint: Springer,
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Semiconductors
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Seong Hwang, Cheol.
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Chemistry and Materials Science (Springer-11644)
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