國立虎尾科技大學 |

Language: English

Back to Search results for [ subject:"High-Power Impulse Magnetron Sputtering." ]

佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 = = In...

洪程彥

佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 = = Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 =/ 洪程彥撰.
Reminder of title:	Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering /
remainder title:	Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering.
Author:	洪程彥
Published:	雲林縣 :國立虎尾科技大學 , : 民104.01.,
Description:	[10], 112面 :圖, 表 ; : 30公分.;
Notes:	指導教授：蔡丕椿,張奇龍.
Subject:	高功率脈衝磁控濺鍍. -
Online resource:	http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-2901201509564500

佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 = = Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering /
洪程彥

佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 =Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering /Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering.洪程彥撰. - 初版. - 雲林縣 :國立虎尾科技大學 ,民104.01. - [10], 112面 :圖, 表 ;30公分.

指導教授：蔡丕椿,張奇龍.

含參考書目.Subjects--Topical Terms:

1026675
高功率脈衝磁控濺鍍.

佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 = = Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering /
LDR:00980nam a2200181 i 450 001 807028
008 150703s2015 ch ak erm 000 0 chi d
040 $a NFU $b chi $c NFU $e CCR
041 0 # $a chi $b chi $b eng
084 $a 008.152M $b 3420 104 $2 ncsclt
100 1 $a 洪程彥 $q (Cheng-Yan Hung) $3 1026159
245 1 0 $a 佔空比對高攻率脈衝磁控濺鍍氮化鈦鋁薄膜顯微結構與性質之影響 = $b Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering / $c 洪程彥撰.
246 3 1 $a Influence of Duty Cycle on Microstructure and Properties of TiAlN Films Synthesized by High Power Impulse Magnetron Sputtering.
250 $a 初版.
260 # $a 雲林縣 : $b 國立虎尾科技大學 , $c 民104.01.
300 $a [10], 112面 : $b 圖, 表 ; $c 30公分.
500 $a 指導教授：蔡丕椿,張奇龍.
500 $a 碩士論文--國立虎尾科技大學材料科學與綠色能源工程研究所.
504 $a 含參考書目.
650 # 4 $a 高功率脈衝磁控濺鍍. $3 1026675
650 # 4 $a 氮化鋁鈦. $3 1026674
650 # 4 $a 佔空比. $3 1026673
650 # 4 $a TiAlN. $3 1026672
650 # 4 $a HiPIMS. $3 1026671
650 # 4 $a Duty cycle. $3 1026670
856 4 # $u http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-2901201509564500