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Handbook of VLSI microlithography = ...
~
Helbert, John N.
Handbook of VLSI microlithography = principles, technology, and applications /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Handbook of VLSI microlithography/ edited by John Helbert.
其他題名:
principles, technology, and applications /
其他作者:
Helbert, John N.
出版者:
Norwich, NY :Noyes Publications/William Andrew Pub., : c2001.,
面頁冊數:
xxi, 1001 p. :ill. ; : 24 cm.;
標題:
Integrated circuits - Very large scale integration. -
電子資源:
click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:
9780815514442 (electronic bk.)
Handbook of VLSI microlithography = principles, technology, and applications /
Handbook of VLSI microlithography
principles, technology, and applications /[electronic resource] :edited by John Helbert. - 2nd ed. - Norwich, NY :Noyes Publications/William Andrew Pub.,c2001. - xxi, 1001 p. :ill. ;24 cm.
Includes bibliographical references and index.
ISBN: 9780815514442 (electronic bk.)
LCCN: 00028173 Subjects--Topical Terms:
563475
Integrated circuits
--Very large scale integration.
LC Class. No.: TK7874 / .H3494 2001
Dewey Class. No.: 621.3815/31
Handbook of VLSI microlithography = principles, technology, and applications /
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click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
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