國立虎尾科技大學 |

Language: English

Login

Back

Switch To: Labeled | MARC Mode | ISBD

Handbook of VLSI microlithography = ...

~

Helbert, John N.

Handbook of VLSI microlithography = principles, technology, and applications /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Handbook of VLSI microlithography/ edited by John Helbert.
Reminder of title:	principles, technology, and applications /
other author:	Helbert, John N.
Published:	Norwich, NY :Noyes Publications/William Andrew Pub., : c2001.,
Description:	xxi, 1001 p. :ill. ; : 24 cm.;
Subject:	Integrated circuits - Very large scale integration. -
Online resource:	click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:	9780815514442 (electronic bk.)

Handbook of VLSI microlithography = principles, technology, and applications /
Handbook of VLSI microlithographyprinciples, technology, and applications /[electronic resource] :edited by John Helbert. - 2nd ed. - Norwich, NY :Noyes Publications/William Andrew Pub.,c2001. - xxi, 1001 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780815514442 (electronic bk.)

LCCN: 00028173 Subjects--Topical Terms:

563475
Integrated circuits
--Very large scale integration.

LC Class. No.: TK7874 / .H3494 2001

Dewey Class. No.: 621.3815/31

Handbook of VLSI microlithography = principles, technology, and applications /
LDR:00856cam a22002294a 45 001 808281
005 20130411112052.0
008 150720s2001 nyua sb 001 0 eng
010 $a 00028173
020 $a 9780815514442 (electronic bk.)
020 $a 9780815514442
035 $a 13001691
040 $a DLC $c DLC $d DLC
041 0 $a eng
042 $a pcc
050 0 0 $a TK7874 $b .H3494 2001
082 0 0 $a 621.3815/31 $2 21
245 0 0 $a Handbook of VLSI microlithography $h [electronic resource] : $b principles, technology, and applications / $c edited by John Helbert.
250 $a 2nd ed.
260 $a Norwich, NY : $b Noyes Publications/William Andrew Pub., $c c2001.
300 $a xxi, 1001 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Integrated circuits $x Very large scale integration. $3 563475
650 0 $a Microlithography. $3 562355
700 1 $a Helbert, John N. $3 904976
856 4 0 $u http://www.sciencedirect.com/science/book/9780815514442 $z click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)

based on 0 review(s)

Multimedia

Reviews

Add a review and share your thoughts with other readers

Export

pickup library

Change password

Login