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High density plasma sources = design...
~
Popov, Oleg A.
High density plasma sources = design, physics, and performance /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
High density plasma sources/ edited by Oleg A. Popov.
Reminder of title:
design, physics, and performance /
other author:
Popov, Oleg A.
Published:
Park Ridge, N.J. :Noyes Publications, : c1995.,
Description:
xx, 445 p. :ill. ; : 25 cm.;
Subject:
Plasma generators. -
Online resource:
click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:
9780815513773 (electronic bk.)
High density plasma sources = design, physics, and performance /
High density plasma sources
design, physics, and performance /[electronic resource] :edited by Oleg A. Popov. - Park Ridge, N.J. :Noyes Publications,c1995. - xx, 445 p. :ill. ;25 cm. - Materials science and process technology series.
Includes bibliographical references and index.
ISBN: 9780815513773 (electronic bk.)
LCCN: 95004918 Subjects--Topical Terms:
905064
Plasma generators.
LC Class. No.: QC718.5.D4 / H54 1995
Dewey Class. No.: 621.044
High density plasma sources = design, physics, and performance /
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[electronic resource] :
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design, physics, and performance /
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edited by Oleg A. Popov.
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c1995.
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xx, 445 p. :
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Includes bibliographical references and index.
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http://www.sciencedirect.com/science/book/9780815513773
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click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
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