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Modeling of film deposition for micr...

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Rossnagel, Stephen M.

Modeling of film deposition for microelectronic applications

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Modeling of film deposition for microelectronic applications/ edited by Stephen Rossnagel.
other author:	Rossnagel, Stephen M.
Published:	San Diego :Academic Press, : c1996.,
Description:	xiv, 291 p. :ill. ; : 24 cm.;
Subject:	Thin films - Congresses. - Computer simulation -
Online resource:	click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:	9780125330220 (electronic bk.)

Modeling of film deposition for microelectronic applications
Modeling of film deposition for microelectronic applications[electronic resource] /edited by Stephen Rossnagel. - San Diego :Academic Press,c1996. - xiv, 291 p. :ill. ;24 cm. - Thin films ;v. 22.

Includes bibliographical references and index.

ISBN: 9780125330220 (electronic bk.)Subjects--Topical Terms:

906358
Thin films
--Computer simulation--Congresses.

LC Class. No.: QC176.A1 / T48 v. 22

Dewey Class. No.: 530.4275

Modeling of film deposition for microelectronic applications
LDR:00799nam a2200205 a 4500 001 808837
005 20130402173605.0
008 150720s1996 caua sb 001 0 eng d
020 $a 9780125330220 (electronic bk.)
020 $a 9780125330220
035 $a 13002431
040 $a OPELS $c OPELS
041 0 $a eng
050 1 4 $a QC176.A1 $b T48 v. 22
082 0 4 $a 530.4275 $2 22
245 0 0 $a Modeling of film deposition for microelectronic applications $h [electronic resource] / $c edited by Stephen Rossnagel.
260 $a San Diego : $b Academic Press, $c c1996.
300 $a xiv, 291 p. : $b ill. ; $c 24 cm.
490 0 $a Thin films ; $v v. 22
504 $a Includes bibliographical references and index.
650 0 $a Thin films $x Computer simulation $v Congresses. $3 906358
700 1 $a Rossnagel, Stephen M. $3 906357
856 4 0 $u http://www.sciencedirect.com/science/book/9780125330220 $z click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)

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