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Modeling of film deposition for micr...
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Rossnagel, Stephen M.
Modeling of film deposition for microelectronic applications
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Modeling of film deposition for microelectronic applications/ edited by Stephen Rossnagel.
其他作者:
Rossnagel, Stephen M.
出版者:
San Diego :Academic Press, : c1996.,
面頁冊數:
xiv, 291 p. :ill. ; : 24 cm.;
標題:
Thin films - Congresses. - Computer simulation -
電子資源:
click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:
9780125330220 (electronic bk.)
Modeling of film deposition for microelectronic applications
Modeling of film deposition for microelectronic applications
[electronic resource] /edited by Stephen Rossnagel. - San Diego :Academic Press,c1996. - xiv, 291 p. :ill. ;24 cm. - Thin films ;v. 22.
Includes bibliographical references and index.
ISBN: 9780125330220 (electronic bk.)Subjects--Topical Terms:
906358
Thin films
--Computer simulation--Congresses.
LC Class. No.: QC176.A1 / T48 v. 22
Dewey Class. No.: 530.4275
Modeling of film deposition for microelectronic applications
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