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Fundamental principles of engineerin...

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Leach, R. K.

Fundamental principles of engineering nanometrology

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Fundamental principles of engineering nanometrology/ Richard Leach.
Author:	Leach, R. K.
Published:	Oxford, OX :Elsevier, William Andrew, : 2014.,
Description:	xxi, 361 p. :ill. ; : 25 cm.;
Subject:	Metrology. -
Online resource:	click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:	9781455777532 (electronic bk.)

Fundamental principles of engineering nanometrology
Leach, R. K.

Fundamental principles of engineering nanometrology[electronic resource] /Richard Leach. - 2nd ed. - Oxford, OX :Elsevier, William Andrew,2014. - xxi, 361 p. :ill. ;25 cm. - Micro & nano technologies series. - Micro & nano technologies..

Includes bibliographical references and index.

ISBN: 9781455777532 (electronic bk.)Subjects--Topical Terms:

786241
Metrology.

LC Class. No.: T174.7 / .L42 2014

Dewey Class. No.: 620.50287

Fundamental principles of engineering nanometrology
LDR:00846nam a2200217 a 4500 001 811498
005 20150630141839.0
008 150720s2014 enka sb 001 0 eng
020 $a 9781455777532 (electronic bk.)
020 $a 9781455777532
035 $a 15000957
040 $a YDXCP $b eng $c YDXCP $d OCLCQ $d CUI $d OCLCF $d CDX $d DLC
041 0 $a eng
050 0 0 $a T174.7 $b .L42 2014
082 0 4 $a 620.50287 $2 23
100 1 $a Leach, R. K. $3 811620
245 1 0 $a Fundamental principles of engineering nanometrology $h [electronic resource] / $c Richard Leach.
250 $a 2nd ed.
260 $a Oxford, OX : $b Elsevier, William Andrew, $c 2014.
300 $a xxi, 361 p. : $b ill. ; $c 25 cm.
490 1 $a Micro & nano technologies series
504 $a Includes bibliographical references and index.
650 0 $a Metrology. $3 786241
650 0 $a Microtechnology. $3 671338
650 0 $a Nanotechnology. $3 557660
830 0 $a Micro & nano technologies. $3 595748
856 4 0 $u http://www.sciencedirect.com/science/book/9781455777532 $z click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)

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