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Introduction to metrology applicatio...

Solecky, Eric.

Introduction to metrology applications in IC manufacturing /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Introduction to metrology applications in IC manufacturing // Bo Su, Eric Solecky, Alok Vaid.
Author:	Su, Bo,
other author:	Solecky, Eric.
Published:	Bellingham, Washington :SPIE, : c2015.,
Description:	xviii, 164 p. :ill. (some col.) ; : 26 cm. +; 1 CD-ROM (4 3/4 in.) +
Subject:	Integrated circuits - Measurement. -
ISBN:	9781628418118 (pbk.) :

Introduction to metrology applications in IC manufacturing /
Su, Bo,1961-

Introduction to metrology applications in IC manufacturing /Bo Su, Eric Solecky, Alok Vaid. - Bellingham, Washington :SPIE,c2015. - xviii, 164 p. :ill. (some col.) ;26 cm. +1 CD-ROM (4 3/4 in.) - Tutorial texts in optical engineering ;v. TT101. - Tutorial texts in optical engineering ;v. TT101..

Includes bibliographical references and index.

Measurement methods and measurement process -- Metrology fundamentals-measurement system characterization and calibration using traditional definitions -- Metrology fundamental, re-defining measurement system analysis -- Metrology in semiconductor IC industry -- Metrology toolsets in IC manufacturing: optical metrology -- Metrology toolsets in IC manufacturing: charged particle metrology systems -- Metrology toolsets in IC manufacturing: additional metrology systems -- Limitations of metrology techniques & hybrid metrology -- Metrology in mask making -- Perspectives on future challenges and considerations.

ISBN: 9781628418118 (pbk.) :NT2156

LCCN: 2015016029Subjects--Topical Terms:

1051775
Integrated circuits
--Measurement.

LC Class. No.: TK7874.58 / .S82 2015

Dewey Class. No.: 621.3815

Introduction to metrology applications in IC manufacturing /
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100 1 $a Su, Bo, $d 1961- $3 1051771
245 1 0 $a Introduction to metrology applications in IC manufacturing / $c Bo Su, Eric Solecky, Alok Vaid.
260 $a Bellingham, Washington : $b SPIE, $c c2015.
300 $a xviii, 164 p. : $b ill. (some col.) ; $c 26 cm. + $e 1 CD-ROM (4 3/4 in.)
490 1 $a Tutorial texts in optical engineering ; $v v. TT101
504 $a Includes bibliographical references and index.
505 0 $a Measurement methods and measurement process -- Metrology fundamentals-measurement system characterization and calibration using traditional definitions -- Metrology fundamental, re-defining measurement system analysis -- Metrology in semiconductor IC industry -- Metrology toolsets in IC manufacturing: optical metrology -- Metrology toolsets in IC manufacturing: charged particle metrology systems -- Metrology toolsets in IC manufacturing: additional metrology systems -- Limitations of metrology techniques & hybrid metrology -- Metrology in mask making -- Perspectives on future challenges and considerations.
650 0 $a Integrated circuits $x Measurement. $3 1051775
650 0 $a Integrated circuits $x Design and construction. $3 561265
700 1 $a Solecky, Eric. $3 1051772
700 1 $a Vaid, Alok. $3 1051773
830 0 $a Tutorial texts in optical engineering ; $v v. TT101. $3 1051774