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Nanofabrication handbook

Cabrini, Stefano.

Nanofabrication handbook

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Nanofabrication handbook/ edited by Stefano Cabrini, Satoshi Kawata.
其他作者:	Cabrini, Stefano.
出版者:	Boca Raton, FL :CRC Press, : c2012.,
面頁冊數:	1 online resource (xv, 518 p.) :ill. :
標題:	Nanostructured materials - Handbooks, manuals, etc. -
電子資源:	http://www.crcnetbase.com/isbn/9781420090536
ISBN:	9781420090536

Nanofabrication handbook
Nanofabrication handbook[electronic resource] /edited by Stefano Cabrini, Satoshi Kawata. - Boca Raton, FL :CRC Press,c2012. - 1 online resource (xv, 518 p.) :ill.

Includes bibliographical references and index.

pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.

ISBN: 9781420090536Subjects--Topical Terms:

561466
Nanostructured materials
--Handbooks, manuals, etc.Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TA418.9.N35 / N2523 2012eb

Dewey Class. No.: 620.1/15

Nanofabrication handbook
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020 $a 9781420090536 $q (electronic bk.)
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020 $a 1280121521
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035 $a (OCoLC)781629152 $z (OCoLC)785337382 $z (OCoLC)787846554 $z (OCoLC)817067651 $z (OCoLC)824114149 $z (OCoLC)880559326
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050 4 $a TA418.9.N35 $b N2523 2012eb
082 0 4 $a 620.1/15 $2 23
245 0 0 $a Nanofabrication handbook $h [electronic resource] / $c edited by Stefano Cabrini, Satoshi Kawata.
260 $a Boca Raton, FL : $b CRC Press, $c c2012.
300 $a 1 online resource (xv, 518 p.) : $b ill.
504 $a Includes bibliographical references and index.
505 0 $a pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
588 0 $a Print version record.
650 0 $a Nanostructured materials $v Handbooks, manuals, etc. $3 561466 $3 731086
650 0 $a Nanostructures $v Congresses. $3 672781 $3 741282
655 0 $a Electronic books. $2 local $3 554714
700 1 $a Cabrini, Stefano. $3 886917
700 1 $a Kawata, Satoshi, $d 1966- $3 812535
856 4 0 $u http://www.crcnetbase.com/isbn/9781420090536

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