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Journal of vacuum science & technolo...

Journal of vacuum science & technology B : = Nanotechnology and microelectronics : Materials, processing, measurement, and phenomena.

Record Type:	Language materials, printed : Serial
Title/Author:	Journal of vacuum science & technology B :/
Reminder of title:	Nanotechnology and microelectronics : Materials, processing, measurement, and phenomena.
remainder title:	JVST B.
Published:	New York :Published for the Society by the American Institute of Physics, : 1983.,
Description:	v :ill ; : 29 cm.;
Notes:	Title from cover.
serial volume memo:	Bimonthly
continue:	Journal of vacuum science & technology. A. Vacuum, surfaces, and films.
Subject:	Surfaces (Physique) -
ISSN:	2166-2746

Journal of vacuum science & technology B : = Nanotechnology and microelectronics : Materials, processing, measurement, and phenomena.
Journal of vacuum science & technology B :Nanotechnology and microelectronics : Materials, processing, measurement, and phenomena.JVST B. - New York :Published for the Society by the American Institute of Physics,1983. - v :ill ;29 cm. - Bimonthly<Jan./Feb. 1985- > - 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)

Title from cover.

ISSN: 2166-2746 = J. vac. sci. technol., B, Vac. surf. films.Subjects--Topical Terms:

1079872
Surfaces (Physique)

LC Class. No.: TJ940 / J668

Dewey Class. No.: 621.5505

Journal of vacuum science & technology B : = Nanotechnology and microelectronics : Materials, processing, measurement, and phenomena.
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040 $a NKMU $b eng $c NKMU $d NKMU
042 $a nbic
050 1 4 $a TJ940 $b J668
082 0 # $a 621.5505
210 1 # $a J. vac. sci. technol., B, Vac. surf. films.
245 0 0 $a Journal of vacuum science & technology B : $b Nanotechnology and microelectronics : Materials, processing, measurement, and phenomena.
246 1 1 $a JVST B.
246 1 3 $a Nanotechnology and microelectronics.
246 1 3 $a Materials, processing, measurement, and phenomena.
260 # $a New York : $b Published for the Society by the American Institute of Physics, $c 1983.
300 $a v : $b ill ; $c 29 cm.
310 $a Bimonthly $b <Jan./Feb. 1985- >
362 0 $a 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)
500 $a Title from cover.
500 $a Chemical abstracts.
650 # 6 $a Surfaces (Physique) $3 1079872
650 # 6 $a Couches minces. $3 1079871
650 # 6 $a Chimie des surfaces. $3 1079870
650 # 6 $a Vide (Technologie) $3 1079869
650 # 0 $a Vacuum technology. $3 678462
780 1 0 $t Journal of vacuum science & technology. A. Vacuum, surfaces, and films.

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last issue: Vol. 36, No. 1 (2018/03/20)
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