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Advances in chemical mechanical plan...
~
Babu, S. V.,
Advances in chemical mechanical planarization (CMP) /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Advances in chemical mechanical planarization (CMP) // edited by Suryadevara Babu.
other author:
Babu, S. V.,
Description:
1 online resource.
Subject:
Chemical mechanical planarization. -
Online resource:
http://www.sciencedirect.com/science/book/9780081001653
ISBN:
9780081001653
Advances in chemical mechanical planarization (CMP) /
Advances in chemical mechanical planarization (CMP) /
edited by Suryadevara Babu. - 1 online resource. - Woodhead publishing series in electronic and optical materials ;number 86. - Woodhead Publishing series in electronic and optical materials ;no. 27..
Includes bibliographical references and index.
ISBN: 9780081001653Subjects--Topical Terms:
1138562
Chemical mechanical planarization.
Index Terms--Genre/Form:
554714
Electronic books.
LC Class. No.: TK7874.84
Dewey Class. No.: 621.381
Advances in chemical mechanical planarization (CMP) /
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edited by Suryadevara Babu.
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2016.
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Includes bibliographical references and index.
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Chemical mechanical planarization.
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http://www.sciencedirect.com/science/book/9780081001653
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