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Advances in chemical mechanical plan...

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Babu, S. V.,

Advances in chemical mechanical planarization (CMP) /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Advances in chemical mechanical planarization (CMP) // edited by Suryadevara Babu.
other author:	Babu, S. V.,
Description:	1 online resource.
Subject:	Chemical mechanical planarization. -
Online resource:	http://www.sciencedirect.com/science/book/9780081001653
ISBN:	9780081001653

Advances in chemical mechanical planarization (CMP) /
Advances in chemical mechanical planarization (CMP) /edited by Suryadevara Babu. - 1 online resource. - Woodhead publishing series in electronic and optical materials ;number 86. - Woodhead Publishing series in electronic and optical materials ;no. 27..

Includes bibliographical references and index.

ISBN: 9780081001653Subjects--Topical Terms:

1138562
Chemical mechanical planarization.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7874.84

Dewey Class. No.: 621.381

Advances in chemical mechanical planarization (CMP) /
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006 m o d
007 cr cnu|||unuuu
008 180521s2016 mau ob 001 0 eng d
020 $a 9780081001653 $q (electronic bk.)
020 $a 9780081002186 $q (electronic bk.)
020 $a 0081002181 $q (electronic bk.)
035 $a (OCoLC)ocn934626626
035 $a els17001644
040 $a UIU $b eng $e rda $e pn $c UIU $d YDXCP $d UIU $d CDX $d OCLCF $d OPELS
041 0 $a eng
050 4 $a TK7874.84
082 0 4 $a 621.381 $2 23
245 0 0 $a Advances in chemical mechanical planarization (CMP) / $c edited by Suryadevara Babu.
264 1 $a Waltham, MA : $b Woodhead Publishing, $c 2016.
300 $a 1 online resource.
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
490 1 $a Woodhead publishing series in electronic and optical materials ; $v number 86
504 $a Includes bibliographical references and index.
650 0 $a Chemical mechanical planarization. $3 1138562
650 0 $a Nanoelectronics. $3 574250
650 0 $a Microelectronics. $3 554956
655 4 $a Electronic books. $2 local $3 554714
700 1 $a Babu, S. V., $e editor. $3 1138561
830 0 $a Woodhead Publishing series in electronic and optical materials ; $v no. 27. $3 916978
856 4 0 $u http://www.sciencedirect.com/science/book/9780081001653

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