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Materials and processes for next gen...
~
Robinson, Alex,
Materials and processes for next generation lithography
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Materials and processes for next generation lithography/ edited by Alex Robinson, Richard Lawson.
其他作者:
Robinson, Alex,
出版者:
Amsterdam, Netherlands :Elsevier, : 2016.,
面頁冊數:
1 online resource
標題:
Microlithography. -
電子資源:
http://www.sciencedirect.com/science/book/9780081003541
ISBN:
9780081003541
Materials and processes for next generation lithography
Materials and processes for next generation lithography
[electronic resource] /edited by Alex Robinson, Richard Lawson. - Amsterdam, Netherlands :Elsevier,2016. - 1 online resource
ISBN: 9780081003541Subjects--Topical Terms:
562355
Microlithography.
Index Terms--Genre/Form:
554714
Electronic books.
LC Class. No.: TK7872.M3
Dewey Class. No.: 621.38153
Materials and processes for next generation lithography
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http://www.sciencedirect.com/science/book/9780081003541
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