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Measurement technology for micro-nan...

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Zhang, Wendong.

Measurement technology for micro-nanometer devices

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Measurement technology for micro-nanometer devices/ Wendong Zhang ... [et al.].
other author:	Zhang, Wendong.
Published:	Singapore :John Wiley & Sons Singapore, : 2017.,
Description:	1 online resource.
Subject:	Microtechnology - Measurement. -
Online resource:	https://onlinelibrary.wiley.com/doi/book/10.1002/9781118717974
ISBN:	9781118717974

Measurement technology for micro-nanometer devices
Measurement technology for micro-nanometer devices[electronic resource] /Wendong Zhang ... [et al.]. - 1st ed. - Singapore :John Wiley & Sons Singapore,2017. - 1 online resource.

Includes bibliographical references and index.

ISBN: 9781118717974

LCCN: 2015032319Subjects--Topical Terms:

1178019
Microtechnology
--Measurement.

LC Class. No.: TA418.9.N35

Dewey Class. No.: 681/.2

Measurement technology for micro-nanometer devices
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008 190510s2017 si ob 001 0 eng
010 $a 2015032319
020 $a 9781118717974 $q (electronic bk.)
020 $a 111871797X $q (electronic bk.)
020 $a 9781118717998 $q (epub)
020 $a 1118717996 $q (epub)
020 $a 9781118717981 $q (pdf)
020 $a 1118717988 $q (pdf)
020 $z 9781118717967 $q (cloth)
020 $z 1118717961 $q (cloth)
035 $a 002534671
040 $a DLC $b eng $c DLC $d N $d DG1 $d UIU $d IDEBK $d YDX $d OCLCO $d DG1
050 0 0 $a TA418.9.N35
082 0 0 $a 681/.2 $2 23
245 0 0 $a Measurement technology for micro-nanometer devices $h [electronic resource] / $c Wendong Zhang ... [et al.].
250 $a 1st ed.
260 $a Singapore : $b John Wiley & Sons Singapore, $c 2017.
300 $a 1 online resource.
504 $a Includes bibliographical references and index.
588 $a Description based on print version record and CIP data provided by publisher.
650 0 $a Microtechnology $x Measurement. $3 1178019
650 0 $a Nanotechnology $x Measurement. $3 1178020
650 0 $a Microelectromechanical systems $x Testing. $3 683849
650 0 $a Physical measurements. $3 902742
700 1 $a Zhang, Wendong. $3 1178018
856 4 0 $u https://onlinelibrary.wiley.com/doi/book/10.1002/9781118717974

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