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Molecular Electronic Transducer Based Seismic Motion Sensors Micro-Fabrication, Packaging and Validation.

紀錄類型:	書目-語言資料,手稿 : Monograph/item
正題名/作者:	Molecular Electronic Transducer Based Seismic Motion Sensors Micro-Fabrication, Packaging and Validation./
作者:	Liang, Mengbing.
面頁冊數:	1 online resource (103 pages)
附註:	Source: Dissertation Abstracts International, Volume: 78-04(E), Section: B.
Contained By:	Dissertation Abstracts International78-04B(E).
標題:	Electrical engineering. -
電子資源:	click for full text (PQDT)
ISBN:	9781369401820

Molecular Electronic Transducer Based Seismic Motion Sensors Micro-Fabrication, Packaging and Validation.
Liang, Mengbing.

Molecular Electronic Transducer Based Seismic Motion Sensors Micro-Fabrication, Packaging and Validation. - 1 online resource (103 pages)

Source: Dissertation Abstracts International, Volume: 78-04(E), Section: B.

Thesis (Ph.D.)

Includes bibliographical references

The instrumentational measurement of seismic motion is important for a wide range of research fields and applications, such as seismology, geology, physics, civil engineering and harsh environment exploration. This report presents series approaches to develop Micro-Electro-Mechanical System (MEMS) enhanced inertial motion sensors including accelerometers, seismometers and inclinometers based on Molecular Electronic Transducers (MET) techniques.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2018

Mode of access: World Wide Web

ISBN: 9781369401820Subjects--Topical Terms:

596380
Electrical engineering.
Index Terms--Genre/Form:

554714
Electronic books.

Molecular Electronic Transducer Based Seismic Motion Sensors Micro-Fabrication, Packaging and Validation.
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245 1 0 $a Molecular Electronic Transducer Based Seismic Motion Sensors Micro-Fabrication, Packaging and Validation.
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300 $a 1 online resource (103 pages)
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500 $a Source: Dissertation Abstracts International, Volume: 78-04(E), Section: B.
500 $a Adviser: Hongyu Yu.
502 $a Thesis (Ph.D.) $c Arizona State University $d 2016.
504 $a Includes bibliographical references
520 $a The instrumentational measurement of seismic motion is important for a wide range of research fields and applications, such as seismology, geology, physics, civil engineering and harsh environment exploration. This report presents series approaches to develop Micro-Electro-Mechanical System (MEMS) enhanced inertial motion sensors including accelerometers, seismometers and inclinometers based on Molecular Electronic Transducers (MET) techniques.
520 $a Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, absence of fragile mechanical moving parts and independence on the direction of sensitivity axis. By using MEMS techniques, a micro MET seismometer is developed with inter-electrode spacing close to 5 mum. The employment of MEMS improves the sensitivity of fabricated device to above 2500 V/(m/s2) under operating bias of 300 mV and input velocity of 8.4mum/s from 0.08Hz to 80Hz. The lowered hydrodynamic resistance by increasing the number of channels improves the self-noise to -135 dB equivalent to 18nG/&check; Hz (G=9.8m/s2 ) around 1.2 Hz.
520 $a Inspired by the advantages of combining MET and MEMS technologies on the development of seismometer, a feasibility study of development of a low frequency accelerometer utilizing MET technology with post-CMOS-compatible fabrication processes is performed. In the fabricated accelerometer, the complicated fabrication of mass-spring system in solid-state MEMS accelerometer is replaced with a much simpler post-CMOS-compatible process containing only deposition of a four-electrode MET structure on a planar substrate, and a liquid inertia mass of an electrolyte droplet. With a specific design of 3D printing based package and replace water based iodide solution by room temperature ionic liquid based electrolyte, the sensitivity relative to the ground motion can reach 103.69V/g, with the resolution of 5.25muG/&check; Hz at 1Hz.
520 $a By combining MET techniques and Zn-Cu electrochemical cell (Galvanic cell), this letter demonstrates a passive motion sensor powered by self-electrochemistry energy, named "Battery Accelerometer". The experimental results indicated the peak sensitivity of battery accelerometer at its resonant frequency 18Hz is 10.4V/G with the resolution of 1.71muG without power consumption.
533 $a Electronic reproduction. $b Ann Arbor, Mich. : $c ProQuest, $d 2018
538 $a Mode of access: World Wide Web
650 4 $a Electrical engineering. $3 596380
650 4 $a Chemical engineering. $3 555952
650 4 $a Mechanical engineering. $3 557493
655 7 $a Electronic books. $2 local $3 554714
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690 $a 0542
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710 2 $a ProQuest Information and Learning Co. $3 1178819
710 2 $a Arizona State University. $b Electrical Engineering. $3 845389
773 0 $t Dissertation Abstracts International $g 78-04B(E).
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=10244394 $z click for full text (PQDT)