國立虎尾科技大學 |

Handbook of Thin Film Technology

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Handbook of Thin Film Technology/ edited by Hartmut Frey, Hamid R. Khan.
其他作者:	Frey, Hartmut.
面頁冊數:	XIII, 379 p. 413 illus.online resource. :
Contained By:	Springer Nature eBook
標題:	Materials—Surfaces. -
電子資源:	https://doi.org/10.1007/978-3-642-05430-3
ISBN:	9783642054303

Handbook of Thin Film Technology
Handbook of Thin Film Technology[electronic resource] /edited by Hartmut Frey, Hamid R. Khan. - 1st ed. 2015. - XIII, 379 p. 413 illus.online resource.

Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

ISBN: 9783642054303

Standard No.: 10.1007/978-3-642-05430-3doiSubjects--Topical Terms:

1253588
Materials—Surfaces.

LC Class. No.: TA418.7-418.76

Dewey Class. No.: 620.44

Handbook of Thin Film Technology
LDR:02624nam a22004215i 4500 001 960488
003 DE-He213
005 20200706172029.0
007 cr nn 008mamaa
008 201211s2015 gw | s |||| 0|eng d
020 $a 9783642054303 $9 978-3-642-05430-3
024 7 $a 10.1007/978-3-642-05430-3 $2 doi
035 $a 978-3-642-05430-3
050 4 $a TA418.7-418.76
050 4 $a TA418.9.T45
072 7 $a TGM $2 bicssc
072 7 $a TEC021040 $2 bisacsh
072 7 $a TGM $2 thema
072 7 $a PNRX $2 thema
082 0 4 $a 620.44 $2 23
245 1 0 $a Handbook of Thin Film Technology $h [electronic resource] / $c edited by Hartmut Frey, Hamid R. Khan.
250 $a 1st ed. 2015.
264 1 $a Berlin, Heidelberg : $b Springer Berlin Heidelberg : $b Imprint: Springer, $c 2015.
300 $a XIII, 379 p. 413 illus. $b online resource.
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
347 $a text file $b PDF $2 rda
505 0 $a Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.
520 $a “Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
650 0 $a Materials—Surfaces. $3 1253588
650 0 $a Thin films. $3 560219
650 0 $a Materials science. $3 557839
650 0 $a Nanotechnology. $3 557660
650 0 $a Tribology. $3 592076
650 0 $a Corrosion and anti-corrosives. $3 583984
650 0 $a Coatings. $3 561718
650 0 $a Physical chemistry. $3 1148725
650 0 $a Optical materials. $3 672695
650 0 $a Electronic materials. $3 1253592
650 1 4 $a Surfaces and Interfaces, Thin Films. $3 671207
650 2 4 $a Characterization and Evaluation of Materials. $3 674449
650 2 4 $a Tribology, Corrosion and Coatings. $3 673589
650 2 4 $a Physical Chemistry. $3 668972
650 2 4 $a Optical and Electronic Materials. $3 593919
700 1 $a Frey, Hartmut. $e editor. $4 edt $4 http://id.loc.gov/vocabulary/relators/edt $3 1254466
700 1 $a Khan, Hamid R. $e editor. $4 edt $4 http://id.loc.gov/vocabulary/relators/edt $3 1254467
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer Nature eBook
776 0 8 $i Printed edition: $z 9783642102530
776 0 8 $i Printed edition: $z 9783642054297
776 0 8 $i Printed edition: $z 9783662500088
856 4 0 $u https://doi.org/10.1007/978-3-642-05430-3
912 $a ZDB-2-CMS
912 $a ZDB-2-SXC
950 $a Chemistry and Materials Science (SpringerNature-11644)
950 $a Chemistry and Material Science (R0) (SpringerNature-43709)