國立虎尾科技大學 |

Nanopositioning Technologies = Fundamentals and Applications /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Nanopositioning Technologies/ edited by Changhai Ru, Xinyu Liu, Yu Sun.
Reminder of title:	Fundamentals and Applications /
other author:	Ru, Changhai.
Description:	VI, 409 p. 279 illus., 203 illus. in color.online resource. :
Contained By:	Springer Nature eBook
Subject:	Nanotechnology. -
Online resource:	https://doi.org/10.1007/978-3-319-23853-1
ISBN:	9783319238531

Nanopositioning Technologies = Fundamentals and Applications /
Nanopositioning TechnologiesFundamentals and Applications /[electronic resource] :edited by Changhai Ru, Xinyu Liu, Yu Sun. - 1st ed. 2016. - VI, 409 p. 279 illus., 203 illus. in color.online resource.

1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319238531

Standard No.: 10.1007/978-3-319-23853-1doiSubjects--Topical Terms:

557660
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Nanopositioning Technologies = Fundamentals and Applications /
LDR:02584nam a22003975i 4500 001 981802
003 DE-He213
005 20201107221330.0
007 cr nn 008mamaa
008 201211s2016 gw | s |||| 0|eng d
020 $a 9783319238531 $9 978-3-319-23853-1
024 7 $a 10.1007/978-3-319-23853-1 $2 doi
035 $a 978-3-319-23853-1
050 4 $a T174.7
072 7 $a TDPB $2 bicssc
072 7 $a TEC027000 $2 bisacsh
072 7 $a TDP $2 thema
082 0 4 $a 620.5 $2 23
245 1 0 $a Nanopositioning Technologies $h [electronic resource] : $b Fundamentals and Applications / $c edited by Changhai Ru, Xinyu Liu, Yu Sun.
250 $a 1st ed. 2016.
264 1 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2016.
300 $a VI, 409 p. 279 illus., 203 illus. in color. $b online resource.
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
347 $a text file $b PDF $2 rda
505 0 $a 1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
520 $a This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
650 0 $a Nanotechnology. $3 557660
650 0 $a Electronics. $3 596389
650 0 $a Microelectronics. $3 554956
650 0 $a Control engineering. $3 1249728
650 0 $a Robotics. $3 561941
650 0 $a Mechatronics. $3 559133
650 0 $a Engineering design. $3 560518
650 1 4 $a Nanotechnology and Microengineering. $3 722030
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 670219
650 2 4 $a Control, Robotics, Mechatronics. $3 768396
650 2 4 $a Engineering Design. $3 670857
700 1 $a Ru, Changhai. $4 edt $4 http://id.loc.gov/vocabulary/relators/edt $3 1104068
700 1 $a Liu, Xinyu. $4 edt $4 http://id.loc.gov/vocabulary/relators/edt $3 1104069
700 1 $a Sun, Yu. $4 edt $4 http://id.loc.gov/vocabulary/relators/edt $3 1104070
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer Nature eBook
776 0 8 $i Printed edition: $z 9783319238524
776 0 8 $i Printed edition: $z 9783319238548
776 0 8 $i Printed edition: $z 9783319795393
856 4 0 $u https://doi.org/10.1007/978-3-319-23853-1
912 $a ZDB-2-ENG
912 $a ZDB-2-SXE
950 $a Engineering (SpringerNature-11647)
950 $a Engineering (R0) (SpringerNature-43712)