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Silicon Anodization as a Structuring Technique = Literature Review, Modeling and Experiments /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Silicon Anodization as a Structuring Technique/ by Alexey Ivanov.
其他題名:	Literature Review, Modeling and Experiments /
作者:	Ivanov, Alexey.
面頁冊數:	XXIX, 316 p. 141 illus., 3 illus. in color.online resource. :
Contained By:	Springer Nature eBook
標題:	Nanotechnology. -
電子資源:	https://doi.org/10.1007/978-3-658-19238-9
ISBN:	9783658192389

Silicon Anodization as a Structuring Technique = Literature Review, Modeling and Experiments /
Ivanov, Alexey.

Silicon Anodization as a Structuring TechniqueLiterature Review, Modeling and Experiments /[electronic resource] :by Alexey Ivanov. - 1st ed. 2018. - XXIX, 316 p. 141 illus., 3 illus. in color.online resource.

Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

ISBN: 9783658192389

Standard No.: 10.1007/978-3-658-19238-9doiSubjects--Topical Terms:

557660
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Silicon Anodization as a Structuring Technique = Literature Review, Modeling and Experiments /
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