國立虎尾科技大學 |

Silicon Anodization as a Structuring Technique = Literature Review, Modeling and Experiments /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Silicon Anodization as a Structuring Technique/ by Alexey Ivanov.
Reminder of title:	Literature Review, Modeling and Experiments /
Author:	Ivanov, Alexey.
Description:	XXIX, 316 p. 141 illus., 3 illus. in color.online resource. :
Contained By:	Springer Nature eBook
Subject:	Nanotechnology. -
Online resource:	https://doi.org/10.1007/978-3-658-19238-9
ISBN:	9783658192389

Silicon Anodization as a Structuring Technique = Literature Review, Modeling and Experiments /
Ivanov, Alexey.

Silicon Anodization as a Structuring TechniqueLiterature Review, Modeling and Experiments /[electronic resource] :by Alexey Ivanov. - 1st ed. 2018. - XXIX, 316 p. 141 illus., 3 illus. in color.online resource.

Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

ISBN: 9783658192389

Standard No.: 10.1007/978-3-658-19238-9doiSubjects--Topical Terms:

557660
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Silicon Anodization as a Structuring Technique = Literature Review, Modeling and Experiments /
LDR:02715nam a22003855i 4500 001 999269
003 DE-He213
005 20200706114244.0
007 cr nn 008mamaa
008 201225s2018 gw | s |||| 0|eng d
020 $a 9783658192389 $9 978-3-658-19238-9
024 7 $a 10.1007/978-3-658-19238-9 $2 doi
035 $a 978-3-658-19238-9
050 4 $a T174.7
072 7 $a TDPB $2 bicssc
072 7 $a TEC027000 $2 bisacsh
072 7 $a TDP $2 thema
082 0 4 $a 620.5 $2 23
100 1 $a Ivanov, Alexey. $e author. $4 aut $4 http://id.loc.gov/vocabulary/relators/aut $3 1254893
245 1 0 $a Silicon Anodization as a Structuring Technique $h [electronic resource] : $b Literature Review, Modeling and Experiments / $c by Alexey Ivanov.
250 $a 1st ed. 2018.
264 1 $a Wiesbaden : $b Springer Fachmedien Wiesbaden : $b Imprint: Springer Vieweg, $c 2018.
300 $a XXIX, 316 p. 141 illus., 3 illus. in color. $b online resource.
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
347 $a text file $b PDF $2 rda
505 0 $a Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.
520 $a Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.
650 0 $a Nanotechnology. $3 557660
650 0 $a Applied mathematics. $3 1069907
650 0 $a Engineering mathematics. $3 562757
650 0 $a Thermodynamics. $3 596513
650 0 $a Heat engineering. $3 681953
650 0 $a Heat transfer. $3 1085480
650 0 $a Mass transfer. $3 556853
650 1 4 $a Nanotechnology and Microengineering. $3 722030
650 2 4 $a Mathematical and Computational Engineering. $3 1139415
650 2 4 $a Engineering Thermodynamics, Heat and Mass Transfer. $3 769147
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer Nature eBook
776 0 8 $i Printed edition: $z 9783658192372
776 0 8 $i Printed edition: $z 9783658192396
856 4 0 $u https://doi.org/10.1007/978-3-658-19238-9
912 $a ZDB-2-ENG
912 $a ZDB-2-SXE
950 $a Engineering (SpringerNature-11647)
950 $a Engineering (R0) (SpringerNature-43712)