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DIY MEMS = Fabricating Microelectromechanical Systems in Open Use Labs /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	DIY MEMS/ by Deborah Munro.
Reminder of title:	Fabricating Microelectromechanical Systems in Open Use Labs /
Author:	Munro, Deborah.
Description:	XVI, 188 p. 19 illus., 4 illus. in color.online resource. :
Contained By:	Springer Nature eBook
Subject:	Electronic circuits. -
Online resource:	https://doi.org/10.1007/978-3-030-33073-6
ISBN:	9783030330736

DIY MEMS = Fabricating Microelectromechanical Systems in Open Use Labs /
Munro, Deborah.

DIY MEMSFabricating Microelectromechanical Systems in Open Use Labs /[electronic resource] :by Deborah Munro. - 1st ed. 2019. - XVI, 188 p. 19 illus., 4 illus. in color.online resource.

Introduction -- National Nanotechnology Coordinated Infrastructure (NNCI) -- Working in a Cleanroom -- MEMS Fabrication Process -- Equipment -- Tools and Supplies -- Designing for MEMS -- Soft Materials -- Imaging & Metrology -- Testing -- Transporting -- Regulatory Approval Pathways -- Locations of the Facilities -- Meet the Lab Directors -- Collaborating with a Facility -- International Options -- Intellectual Property -- Getting Project Assistance -- Costs -- Taking the First Steps.

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.

ISBN: 9783030330736

Standard No.: 10.1007/978-3-030-33073-6doiSubjects--Topical Terms:

563332
Electronic circuits.

LC Class. No.: TK7867-7867.5

Dewey Class. No.: 621.3815

DIY MEMS = Fabricating Microelectromechanical Systems in Open Use Labs /
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520 $a This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.
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