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Microlithography = science and techn...

ProQuest (Firm)

Microlithography = science and technology /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Microlithography/ edited by Kazuaki Suzuki, Bruce W. Smith.
Reminder of title:	science and technology /
other author:	Smith, Bruce W.,
Published:	Boca Raton :CRC Press, : c2007.,
Description:	848 p. :ill. :
Subject:	Manufacturing processes. -
Online resource:	Click to View

Microlithography = science and technology /
Microlithographyscience and technology /[electronic resource] :edited by Kazuaki Suzuki, Bruce W. Smith. - 2nd ed. - Boca Raton :CRC Press,c2007. - 848 p. :ill. - Optical science and engineering ;126. - Optical science and engineering (Boca Raton, Fla.) ;138..

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

Subjects--Topical Terms:

564466
Manufacturing processes.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7836 / .M525 2007

Dewey Class. No.: 621.3815/31

Microlithography = science and technology /
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245 0 0 $a Microlithography $h [electronic resource] : $b science and technology / $c edited by Kazuaki Suzuki, Bruce W. Smith.
250 $a 2nd ed.
260 $a Boca Raton : $b CRC Press, $c c2007.
300 $a 848 p. : $b ill.
490 1 $a Optical science and engineering ; $v 126
504 $a Includes bibliographical references and index.
533 $a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650 0 $a Manufacturing processes. $3 564466
650 0 $a Metal oxide semiconductors, Complementary $x Design and construction. $3 564465
650 0 $a Integrated circuits $x Masks. $3 564464
650 0 $a Microlithography $x Industrial applications. $3 564463
655 4 $a Electronic books. $2 local $3 554714
700 1 $a Smith, Bruce W., $d 1959- $3 564469
700 1 $a Suzuki, Kazuaki. $3 564468
710 2 $a ProQuest (Firm) $3 1133097
830 0 $a Optical science and engineering (Boca Raton, Fla.) ; $v 138. $3 744847
856 4 0 $u https://ebookcentral.proquest.com/lib/nfu/detail.action?docID=291389 $z Click to View

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