| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
Introduction to spectroscopic ellipsometry of thin film materials :/ Andrew T.S. Wee, Xinmao Yin, Chi Sin Tang. |
| Reminder of title: |
instrumentation, data analysis, and applications / |
| Author: |
Wee, Andrew T. S. |
| other author: |
Yin, Xinmao. |
| Published: |
Weinheim :Wiley-VCH, : c2022., |
| Description: |
x, 187 p. :ill. (chiefly col.) ; : 25 cm.; |
| Subject: |
Thin films - Spectra. - |
| ISBN: |
9783527349517 (pbk.) : |