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Microlithography = science and techn...

Smith, Bruce W., (1959-)

Microlithography = science and technology /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Microlithography/ edited by Kazuaki Suzuki, Bruce W. Smith.
Reminder of title:	science and technology /
other author:	Suzuki, Kazuaki.
Published:	Boca Raton :CRC Press, : c2007.,
Description:	848 p. :ill. ; : 27 cm.;
Notes:	Title from e-book title screen (viewed October 15, 2007).
Subject:	Microlithography - Industrial applications. -
Online resource:	Connect to MyiLibrary resource
ISBN:	9786610809639

Microlithography = science and technology /
Microlithographyscience and technology /[electronic resource] :edited by Kazuaki Suzuki, Bruce W. Smith. - 2nd ed. - Boca Raton :CRC Press,c2007. - 848 p. :ill. ;27 cm. - Optical science and engineering ;126. - Optical science and engineering (Boca Raton, Fla.) ;126..

Title from e-book title screen (viewed October 15, 2007).

Includes bibliographical references and index.

Electronic reproduction.
UK :
MyiLibrary,
2007

Available via World Wide Web.

ISBN: 9786610809639

LCCN: 2006031516

Nat. Bib. No.: GBA696464bnb

Nat. Bib. Agency Control No.: 013602008UkSubjects--Topical Terms:

564463
Microlithography
--Industrial applications.Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7836 / .M525 2007eb

Dewey Class. No.: 621.3815/31

Microlithography = science and technology /
LDR:01145nam 22003133a 4500 001 561799
003 DLC
005 20070828155615.0
006 m d
007 cr zn |
008 060921s2007 flua sb 001 0 eng
010 $a 2006031516
015 $a GBA696464 $2 bnb
016 7 $a 013602008 $2 Uk
020 $a 9786610809639
020 $z 0824790243 (Cloth)
035 $a 080963 $b MIL
035 $a cis5933705
040 $a UK-RwCLS $c UK-RwCLS
050 1 4 $a TK7836 $b .M525 2007eb
082 0 4 $a 621.3815/31 $2 22
245 0 0 $a Microlithography $h [electronic resource] : $b science and technology / $c edited by Kazuaki Suzuki, Bruce W. Smith.
250 $a 2nd ed.
260 $a Boca Raton : $c c2007. $b CRC Press,
300 $a 848 p. : $b ill. ; $c 27 cm.
490 1 $a Optical science and engineering ; $v 126
500 $a Title from e-book title screen (viewed October 15, 2007).
504 $a Includes bibliographical references and index.
533 $a Electronic reproduction. $b UK : $c MyiLibrary, $d 2007 $n Available via World Wide Web. $n Access may be limited to MIL affiliated libraries.
650 $a Microlithography $x Industrial applications. $3 564463
650 $a Integrated circuits $x Masks. $3 564464
650 $a Metal oxide semiconductors, Complementary $x Design and construction. $3 564465
650 $a Manufacturing processes. $3 564466
655 $a Electronic books. $2 local $3 554714
700 $a Suzuki, Kazuaki. $3 564468
700 $a Smith, Bruce W., $d 1959- $3 564469
710 $a MyiLibrary. $3 554718
830 $a Optical science and engineering (Boca Raton, Fla.) ; $v 126. $3 564467
856 4 $z Connect to MyiLibrary resource $u http://www.myilibrary.com?id=80963

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