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Fundamentals of microfabrication and...

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Fundamentals of microfabrication and nanotechnology // Marc J. Madou.
Author:	Madou, Marc J.
other author:	Madou, Marc J.
Published:	Boca Raton, Fla. ;CRC Press, : c2012.:,
Description:	3 v. :ill. (some col.) ; : 29 cm.;
Notes:	Rev. ed. of: Fundamentals of microfabrication. 2002.
Subject:	Microelectronics. -
ISBN:	9780849331800 (set : cloth)

Fundamentals of microfabrication and nanotechnology /
Madou, Marc J.

Fundamentals of microfabrication and nanotechnology /Marc J. Madou. - 3rd ed. - Boca Raton, Fla. ;CRC Press,c2012.: - 3 v. :ill. (some col.) ;29 cm.

Rev. ed. of: Fundamentals of microfabrication. 2002.

Includes bibliographical references and index.

V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.

ISBN: 9780849331800 (set : cloth)

Nat. Bib. No.: GBA8E1445bnbSubjects--Topical Terms:

554956
Microelectronics.

LC Class. No.: TK7875 / .M33 2012

Dewey Class. No.: 621.38152

Fundamentals of microfabrication and nanotechnology /
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020 $a 0849331803 (set : cloth)
020 $a 9781420055115 (v. 1 : cloth) : $c NT3089
020 $a 1420055119 (v. 1 : cloth)
020 $a 9781420055191 (v. 2 : cloth) : $c NT3089
020 $a 1420055194 (v. 2 : cloth)
020 $a 9781420055160 (v. 3 : cloth)
020 $a 142005516X (v. 3 : cloth)
035 $a (OCoLC)ocn751701536
035 $a (OCoLC)751701536
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050 0 0 $a TK7875 $b .M33 2012
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100 1 $a Madou, Marc J. $3 797927
245 1 0 $a Fundamentals of microfabrication and nanotechnology / $c Marc J. Madou.
250 $a 3rd ed.
260 # $a Boca Raton, Fla. ; $a London , $c c2012.: $b CRC Press,
300 $a 3 v. : $b ill. (some col.) ; $c 29 cm.
500 $a Rev. ed. of: Fundamentals of microfabrication. 2002.
504 $a Includes bibliographical references and index.
505 0 # $a V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.
650 # 0 $a Microelectronics. $3 554956
650 # 0 $a Integrated circuits $x Design and construction. $3 561265
650 # 0 $a Microelectromechanical systems $x Design and construction. $3 562714
650 # 0 $a Machining. $3 599799
650 # 0 $a Lasers $x Industrial applications. $3 599798
650 # 0 $a Microelectronic packaging. $3 598419
650 # 0 $a Microfabrication. $3 639547
650 # 0 $a Nanostructured materials $x Design and construction. $3 655690
700 1 # $a Madou, Marc J. $3 797927