| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
半導體製程設備技術 =/ 楊子明等編著. |
| Reminder of title: |
Semiconductor technology-process and equipment / |
| remainder title: |
Semiconductor technology-process and equipment |
| Author: |
楊子明 |
| Published: |
臺北市 :五南, : 2011.12, |
| Description: |
[12],398面 :圖, 表 ; : 26公分; |
| Subject: |
半導體 - |
| ISBN: |
9789571164748 (平裝) : |