| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
Foundations of MEMS // Chang Liu. |
| Author: |
Liu, Chang, |
| Published: |
Upper Saddle River, N.J. :Prentice Hall, : c2012., |
| Description: |
xiv, 562 p. :ill. ; : 24 cm.; |
| Subject: |
Microelectromechanical systems. - |
| ISBN: |
9780132497367 (cloth) : |