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Lithography : = main techniques /

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Landis, Stefan.

Lithography : = main techniques /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Lithography :/ edited by Stefan Landis.
Reminder of title:	main techniques /
other author:	Landis, Stefan.
Published:	London :Wiley, : c2011.,
Description:	xxv, 377 p. :ill. ; : 24 cm.;
Subject:	Microlithography. -
Online resource:	http://catalogimages.wiley.com/images/db/jimages/9781848212022.jpg
ISBN:	9781848212022 (hbk.) :

Lithography : = main techniques /
Lithography :main techniques /edited by Stefan Landis. - London :Wiley,c2011. - xxv, 377 p. :ill. ;24 cm.

Includes bibliographical references and index.

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components."

ISBN: 9781848212022 (hbk.) :NT4646

LCCN: 2010040731Subjects--Topical Terms:

562355
Microlithography.

LC Class. No.: TK7872.M3 / L58 2011

Dewey Class. No.: 621.3815/31

Lithography : = main techniques /
LDR:01207cam a2200241 a 4500 001 754672
005 20130802171343.0
008 130813s2011 enka erb 001 0 eng
010 $a 2010040731
020 $a 9781848212022 (hbk.) : $c NT4646
020 $a 184821202X
035 $a (OCoLC)ocn500823606
035 $a 00039184
040 $a DLC $c DLC $d YDX $d BTCTA $d YDXCP $d CDX $d BWX $d UKMGB $d DLC $d NFU
041 0 # $a eng
042 $a pcc
050 0 0 $a TK7872.M3 $b L58 2011
082 0 0 $a 621.3815/31 $2 22
245 0 0 $a Lithography : $b main techniques / $c edited by Stefan Landis.
260 # $a London : $a Hoboken, NJ : $c c2011. $b Wiley, $b ISTE ;
300 $a xxv, 377 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
520 $a "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components."
650 # 0 $a Microlithography. $3 562355
700 1 # $a Landis, Stefan. $3 912763
856 4 2 $3 Cover image $u http://catalogimages.wiley.com/images/db/jimages/9781848212022.jpg

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E039184

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621.381531 L776 2011

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1 records • Pages 1 •
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