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Sputtering materials for VLSI and th...
~
Sarkar, Jaydeep, ((Materials scientist))
Sputtering materials for VLSI and thin film devices
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Sputtering materials for VLSI and thin film devices/ by Jaydeep Sarkar.
Author:
Sarkar, Jaydeep,
Published:
Norwich, N.Y. :William Andrew ; : 2011.,
Description:
x, 603 p. :ill. ; : 25 cm.;
Subject:
Microelectronics - Materials. -
Online resource:
http://www.sciencedirect.com/science/book/9780815515937
ISBN:
9780815515937 (electronic bk.)
Sputtering materials for VLSI and thin film devices
Sarkar, Jaydeep,(Materials scientist)
Sputtering materials for VLSI and thin film devices
[electronic resource] /by Jaydeep Sarkar. - Norwich, N.Y. :William Andrew ;2011. - x, 603 p. :ill. ;25 cm.
Includes bibliographical references and index.
ISBN: 9780815515937 (electronic bk.)Subjects--Topical Terms:
889084
Microelectronics
--Materials.
LC Class. No.: TK7874 / .S273 2014
Dewey Class. No.: 621.381
Sputtering materials for VLSI and thin film devices
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[electronic resource] /
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by Jaydeep Sarkar.
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Norwich, N.Y. :
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Oxford :
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William Andrew ;
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2011.
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Elsevier Science [distributor],
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x, 603 p. :
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ill. ;
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25 cm.
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Includes bibliographical references and index.
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Microelectronics
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Materials.
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889084
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Materials.
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Sputtering (Physics)
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http://www.sciencedirect.com/science/book/9780815515937
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