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Poly-SiGe for MEMS-above-CMOS sensors
~
Gonzalez Ruiz, Pilar.
Poly-SiGe for MEMS-above-CMOS sensors
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Poly-SiGe for MEMS-above-CMOS sensors/ by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
Author:
Gonzalez Ruiz, Pilar.
other author:
De Meyer, Kristin.
Published:
Dordrecht :Springer Netherlands : : 2014.,
Description:
xvi, 199 p. :ill., digital ; : 24 cm.;
Contained By:
Springer eBooks
Subject:
Microelectromechanical systems. -
Online resource:
http://dx.doi.org/10.1007/978-94-007-6799-7
ISBN:
9789400767997 (electronic bk.)
Poly-SiGe for MEMS-above-CMOS sensors
Gonzalez Ruiz, Pilar.
Poly-SiGe for MEMS-above-CMOS sensors
[electronic resource] /by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw. - Dordrecht :Springer Netherlands :2014. - xvi, 199 p. :ill., digital ;24 cm. - Springer series in advanced microelectronics,v.441437-0387 ;. - Springer series in advanced microelectronics ;33..
ISBN: 9789400767997 (electronic bk.)Subjects--Topical Terms:
559134
Microelectromechanical systems.
LC Class. No.: TK7875 / .G66 2014
Dewey Class. No.: 621.381
Poly-SiGe for MEMS-above-CMOS sensors
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Engineering (Springer-11647)
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