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Interlayer dielectrics for semicondu...

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Sinha, A. K.

Interlayer dielectrics for semiconductor technologies

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Interlayer dielectrics for semiconductor technologies/ edited by S.P. Murarka, M. Eizenberg, A.K. Sinha.
other author:	Murarka, S. P.
Published:	Amsterdam ;Elsevier/Academic Press, : 2003.,
Description:	xiv, 444 p. :ill. ; : 25 cm.;
Subject:	Semiconductor wafers. -
Online resource:	click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)
ISBN:	9780125112215 (electronic bk.)

Interlayer dielectrics for semiconductor technologies
Interlayer dielectrics for semiconductor technologies[electronic resource] /edited by S.P. Murarka, M. Eizenberg, A.K. Sinha. - Amsterdam ;Elsevier/Academic Press,2003. - xiv, 444 p. :ill. ;25 cm.

Includes bibliographical references (p.425-[427]) and index.

ISBN: 9780125112215 (electronic bk.) Subjects--Topical Terms:

905438
Semiconductor wafers.

LC Class. No.: TK7871.85 / .I584 2003

Dewey Class. No.: 621.3815/2

Interlayer dielectrics for semiconductor technologies
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008 150720s2003 ne a sb 001 0 eng d
020 $a 9780125112215 (electronic bk.)
020 $a 9780125112215
035 $a 13001930
040 $a OPELS $c OPELS $d OPELS
041 0 $a eng
050 4 $a TK7871.85 $b .I584 2003
082 0 4 $a 621.3815/2 $2 22
245 0 0 $a Interlayer dielectrics for semiconductor technologies $h [electronic resource] / $c edited by S.P. Murarka, M. Eizenberg, A.K. Sinha.
260 $a Amsterdam ; $a Boston : $b Elsevier/Academic Press, $c 2003.
300 $a xiv, 444 p. : $b ill. ; $c 25 cm.
504 $a Includes bibliographical references (p.425-[427]) and index.
650 0 $a Semiconductor wafers. $3 905438
650 0 $a Dielectrics. $3 598321
700 1 $a Murarka, S. P. $3 905435
700 1 $a Eizenberg, M. $q (Moshe) $3 905436
700 1 $a Sinha, A. K. $q (Ashok K.) $3 905437
856 4 0 $u http://www.sciencedirect.com/science/book/9780125112215 $z click for full text (2015 TAEBDC PDA eBooks Trial, Trial Period: 2015.6.3-2015.12.31)

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