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Optical lithography : = here is why /

~

Lin, Burn Jeng, (1942-)

Optical lithography : = here is why /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Optical lithography :/ Burn J. Lin.
Reminder of title:	here is why /
Author:	Lin, Burn Jeng,
Published:	Bellingham, Wash. :SPIE, : c2010.,
Description:	xiv, 477 p. :ill. ; : 27 cm.;
Notes:	Errata slip inserted.
Subject:	Microlithography. -
ISBN:	9780819475602 :

Optical lithography : = here is why /
Lin, Burn Jeng,1942-

Optical lithography :here is why /Burn J. Lin. - Bellingham, Wash. :SPIE,c2010. - xiv, 477 p. :ill. ;27 cm. - SPIE ;v. PM190.

Errata slip inserted.

Includes bibliographical references and index.

ISBN: 9780819475602 :NT3004

LCCN: 2009049350Subjects--Topical Terms:

562355
Microlithography.

LC Class. No.: TK7872.M3 / .L56 2009

Dewey Class. No.: 621.3815/31

Optical lithography : = here is why /
LDR:00621cam a2200205 a 4500 001 826140
005 20151202092933.0
008 151211s2010 waua b 001 0 eng
010 $a 2009049350
020 $a 9780819475602 : $c NT3004
035 $a 00042035
040 $a DLC $c DLC $d DLC $d NFU
041 0 $a eng
050 0 0 $a TK7872.M3 $b .L56 2009
082 0 0 $a 621.3815/31 $2 22
100 1 $a Lin, Burn Jeng, $d 1942- $3 877375
245 1 0 $a Optical lithography : $b here is why / $c Burn J. Lin.
260 $a Bellingham, Wash. : $b SPIE, $c c2010.
300 $a xiv, 477 p. : $b ill. ; $c 27 cm.
490 0 $a SPIE ; $v v. PM190
500 $a Errata slip inserted.
504 $a Includes bibliographical references and index.
650 0 $a Microlithography. $3 562355
650 0 $a Semiconductors $x Etching. $3 877240
650 0 $a Lasers $x Industrial applications. $3 599798

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No. of reservations

E042035

圖書館3F 書庫

一般圖書(BOOK)

一般圖書

621.381531 L735 2010

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1 records • Pages 1 •
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