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Nanopositioning technologies = fundamentals and applications /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Nanopositioning technologies/ edited by Changhai Ru, Xinyu Liu, Yu Sun.
Reminder of title:	fundamentals and applications /
other author:	Ru, Changhai.
Published:	Cham :Springer International Publishing : : 2016.,
Description:	vi, 409 p. :ill., digital ; : 24 cm.;
Contained By:	Springer eBooks
Subject:	Nanoelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/978-3-319-23853-1
ISBN:	9783319238531

Nanopositioning technologies = fundamentals and applications /
Nanopositioning technologiesfundamentals and applications /[electronic resource] :edited by Changhai Ru, Xinyu Liu, Yu Sun. - Cham :Springer International Publishing :2016. - vi, 409 p. :ill., digital ;24 cm.

1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319238531

Standard No.: 10.1007/978-3-319-23853-1doiSubjects--Topical Terms:

591719
Nanoelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

Nanopositioning technologies = fundamentals and applications /
LDR:02171nam a2200313 a 4500 001 861561
003 DE-He213
005 20160808113545.0
006 m d
007 cr nn 008maaau
008 170720s2016 gw s 0 eng d
020 $a 9783319238531 $q (electronic bk.)
020 $a 9783319238524 $q (paper)
024 7 $a 10.1007/978-3-319-23853-1 $2 doi
035 $a 978-3-319-23853-1
040 $a GP $c GP
041 0 $a eng
050 4 $a TK7875
072 7 $a TDPB $2 bicssc
072 7 $a TEC027000 $2 bisacsh
082 0 4 $a 620.5 $2 23
090 $a TK7875 $b .N186 2016
245 0 0 $a Nanopositioning technologies $h [electronic resource] : $b fundamentals and applications / $c edited by Changhai Ru, Xinyu Liu, Yu Sun.
260 $a Cham : $c 2016. $b Springer International Publishing : $b Imprint: Springer,
300 $a vi, 409 p. : $b ill., digital ; $c 24 cm.
505 0 $a 1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
520 $a This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
650 0 $a Nanoelectromechanical systems. $3 591719
650 1 4 $a Engineering. $3 561152
650 2 4 $a Nanotechnology and Microengineering. $3 722030
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 670219
650 2 4 $a Control, Robotics, Mechatronics. $3 768396
650 2 4 $a Engineering Design. $3 670857
700 1 $a Ru, Changhai. $3 1104068
700 1 $a Liu, Xinyu. $3 1104069
700 1 $a Sun, Yu. $3 1104070
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-3-319-23853-1
950 $a Engineering (Springer-11647)