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Electrochemical micromachining for n...

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Bhattacharyya, Bijoy,

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Electrochemical micromachining for nanofabrication, MEMS and nanotechnology // Bijoy Bhattacharyya.
Author:	Bhattacharyya, Bijoy,
Description:	1 online resource
Subject:	Micromachining. -
Online resource:	http://www.sciencedirect.com/science/book/9780323327374
ISBN:	9780323327374

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
Bhattacharyya, Bijoy,

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /Bijoy Bhattacharyya. - 1 online resource

Includes bibliographical refereneces.

ISBN: 9780323327374Subjects--Topical Terms:

641444
Micromachining.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TJ1191.5

Dewey Class. No.: 620.5

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
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008 180521s2015 enk ob 000 0 eng d
020 $a 9780323327374 $q (electronic bk.)
020 $a 9780323352888 $q (electronic bk.)
020 $a 032335288X $q (electronic bk.)
035 $a (OCoLC)ocn907467274
035 $a els17001235
040 $a UIU $b eng $e rda $e pn $c UIU $d IDEBK $d EBLCP $d UIU $d OPELS
041 0 $a eng
050 4 $a TJ1191.5
082 0 4 $a 620.5 $2 23
100 1 $a Bhattacharyya, Bijoy, $e author. $3 1138960
245 1 0 $a Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / $c Bijoy Bhattacharyya.
264 1 $a Oxford, UK : $b William Andrew, an imprint of Elsevier, $c 2015.
300 $a 1 online resource
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
504 $a Includes bibliographical refereneces.
650 0 $a Micromachining. $3 641444
650 0 $a Nanotechnology. $3 557660
650 0 $a Microelectromechanical systems. $3 559134
655 4 $a Electronic books. $2 local $3 554714
856 4 0 $u http://www.sciencedirect.com/science/book/9780323327374

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