國立虎尾科技大學 |

Low Temperature Graphene Growth and Its Applications in Electronic and Optical Devices.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Low Temperature Graphene Growth and Its Applications in Electronic and Optical Devices./
Author:	Chugh, Sunny.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 2017,
Description:	101 p.
Notes:	Source: Dissertation Abstracts International, Volume: 79-03(E), Section: B.
Contained By:	Dissertation Abstracts International79-03B(E).
Subject:	Electrical engineering. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=10280574
ISBN:	9780355254280

Low Temperature Graphene Growth and Its Applications in Electronic and Optical Devices.
Chugh, Sunny.

Low Temperature Graphene Growth and Its Applications in Electronic and Optical Devices. - Ann Arbor : ProQuest Dissertations & Theses, 2017 - 101 p.

Source: Dissertation Abstracts International, Volume: 79-03(E), Section: B.

Thesis (Ph.D.)--Purdue University, 2017.

Graphene, a two dimensional allotrope of carbon in a honeycomb lattice, has gathered wide attention due to its excellent electrical, thermal, optical and mechanical properties. It has extremely high electron/hole mobility, very high thermal conductivity and fascinating optical properties, and combined with its mechanical strength and elasticity, graphene is believed to find commercial applications in existing as well as novel technologies. One of the biggest reasons behind the rapid development in graphene research during the last decade is the fact that laboratory procedures to obtain high quality graphene are rather cheap and simple. However, any new material market is essentially driven by the progress in its large scale commercial production with minimal costs, with properties that are suited for different applications. And it is in this aspect that graphene is still required to make a huge progress before its commercial benefits can be derived. Laboratory graphene synthesis techniques such as mechanical exfoliation, liquid phase exfoliation and SiC graphene growth pose several challenges in terms of cost, reliability and scalability. To this end, Chemical Vapor Deposition (CVD) growth of graphene has emerged as a widely used synthesis method that overcomes these problems. Unfortunately, conventional thermal CVD requires a high temperature of growth and a catalytic metal substrate, making the undesirable step of graphene transfer a necessity. Besides requiring a catalyst, the high temperature of growth also limits the range of growth substrates. In this work, I have successfully demonstrated low temperature (~550 °C) growth of graphene directly on dielectric materials using a Plasma-Enhanced CVD (PECVD) process. The PECVD technique described here solves the issues faced by conventional CVD methods and provides a direct route for graphene synthesis on arbitrary materials at relatively low temperatures. Detailed growth studies, as described here, illustrate the difference between the PECVD and the CVD growth mechanisms. This work also provides the first experimental comparison of graphene growth rates on different substrates using PECVD.

ISBN: 9780355254280Subjects--Topical Terms:

596380
Electrical engineering.

Low Temperature Graphene Growth and Its Applications in Electronic and Optical Devices.
LDR:03653nam a2200325 4500 001 890683
005 20180727091502.5
008 180907s2017 ||||||||||||||||| ||eng d
020 $a 9780355254280
035 $a (MiAaPQ)AAI10280574
035 $a (MiAaPQ)purdue:21461
035 $a AAI10280574
040 $a MiAaPQ $c MiAaPQ
100 1 $a Chugh, Sunny. $3 1148528
245 1 0 $a Low Temperature Graphene Growth and Its Applications in Electronic and Optical Devices.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2017
300 $a 101 p.
500 $a Source: Dissertation Abstracts International, Volume: 79-03(E), Section: B.
500 $a Adviser: Zhihong Chen.
502 $a Thesis (Ph.D.)--Purdue University, 2017.
520 $a Graphene, a two dimensional allotrope of carbon in a honeycomb lattice, has gathered wide attention due to its excellent electrical, thermal, optical and mechanical properties. It has extremely high electron/hole mobility, very high thermal conductivity and fascinating optical properties, and combined with its mechanical strength and elasticity, graphene is believed to find commercial applications in existing as well as novel technologies. One of the biggest reasons behind the rapid development in graphene research during the last decade is the fact that laboratory procedures to obtain high quality graphene are rather cheap and simple. However, any new material market is essentially driven by the progress in its large scale commercial production with minimal costs, with properties that are suited for different applications. And it is in this aspect that graphene is still required to make a huge progress before its commercial benefits can be derived. Laboratory graphene synthesis techniques such as mechanical exfoliation, liquid phase exfoliation and SiC graphene growth pose several challenges in terms of cost, reliability and scalability. To this end, Chemical Vapor Deposition (CVD) growth of graphene has emerged as a widely used synthesis method that overcomes these problems. Unfortunately, conventional thermal CVD requires a high temperature of growth and a catalytic metal substrate, making the undesirable step of graphene transfer a necessity. Besides requiring a catalyst, the high temperature of growth also limits the range of growth substrates. In this work, I have successfully demonstrated low temperature (~550 °C) growth of graphene directly on dielectric materials using a Plasma-Enhanced CVD (PECVD) process. The PECVD technique described here solves the issues faced by conventional CVD methods and provides a direct route for graphene synthesis on arbitrary materials at relatively low temperatures. Detailed growth studies, as described here, illustrate the difference between the PECVD and the CVD growth mechanisms. This work also provides the first experimental comparison of graphene growth rates on different substrates using PECVD.
520 $a In the second part of my thesis, I have discussed some of the potential applications of PECVD graphene, including graphene as a diffusion barrier, ultra-dark graphene metamaterials, graphene-protected metal plasmonics and copper-graphene hybrids for RF transmission line applications. The experimental findings discussed here lay a solid platform for integration of graphene in damascene structures, low-loss plasmonic materials, flexible electronics and dark materials, among others.
590 $a School code: 0183.
650 4 $a Electrical engineering. $3 596380
650 4 $a Materials science. $3 557839
650 4 $a Nanotechnology. $3 557660
690 $a 0544
690 $a 0794
690 $a 0652
710 2 $a Purdue University. $b Electrical and Computer Engineering. $3 1148521
773 0 $t Dissertation Abstracts International $g 79-03B(E).
790 $a 0183
791 $a Ph.D.
792 $a 2017
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=10280574