| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
半導體製程設備 = / 楊子明等編著. |
| Reminder of title: |
Semiconductor technology- process and equipment / |
| remainder title: |
Semiconductor technology- process and equipment |
| other author: |
楊子明, |
| Published: |
臺北市 : 五南, : 2017.12., |
| Description: |
410面 : 圖, 表 ; : 26公分; |
| Subject: |
半導體 - |
| ISBN: |
9789571195131 |