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Mechanics of microsystems

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Corigliano, Alberto.

Mechanics of microsystems

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Mechanics of microsystems/ Alberto Corigliano ... [et al.]
other author:	Corigliano, Alberto.
Published:	Hoboken, NJ :John Wiley & Sons, : c2018.,
Description:	1 online resource.
Subject:	Microelectromechanical systems. -
Online resource:	https://onlinelibrary.wiley.com/doi/book/10.1002/9781119053828
ISBN:	9781119053828

Mechanics of microsystems
Mechanics of microsystems[electronic resource] /Alberto Corigliano ... [et al.] - 1st ed. - Hoboken, NJ :John Wiley & Sons,c2018. - 1 online resource. - Microsystem and nanotechnology series ;7646. - Wiley microsystem and nanotechnology series ;7646..

Includes bibliographical references and index.

ISBN: 9781119053828

LCCN: 2017052694Subjects--Topical Terms:

559134
Microelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Mechanics of microsystems
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010 $a 2017052694
020 $a 9781119053828 $q (electronic bk.)
020 $a 111905382X $q (electronic bk.)
020 $a 9781119053804 $q (electronic bk.)
020 $a 1119053803 $q (electronic bk.)
020 $a 9781119053811 $q (electronic bk.)
020 $a 1119053811 $q (electronic bk.)
020 $z 9781119053835 $q (cloth)
035 $a 002620923
040 $a DLC $b eng $c DLC $d OCLCO $d N $d IDEBK $d OCLCF $d UPM $d DG1 $d OCLCQ $d TEFOD $d UAB $d YDX $d COO
050 1 0 $a TK7875
082 0 0 $a 621.381 $2 23
245 0 0 $a Mechanics of microsystems $h [electronic resource] / $c Alberto Corigliano ... [et al.]
250 $a 1st ed.
260 $a Hoboken, NJ : $b John Wiley & Sons, $c c2018.
300 $a 1 online resource.
490 1 $a Microsystem and nanotechnology series ; $v 7646
504 $a Includes bibliographical references and index.
588 0 $a Print version record and CIP data provided by publisher; resource not viewed.
650 0 $a Microelectromechanical systems. $3 559134
700 1 $a Corigliano, Alberto. $3 1178415
830 0 $a Wiley microsystem and nanotechnology series ; $v 7646. $3 1178416
856 4 0 $u https://onlinelibrary.wiley.com/doi/book/10.1002/9781119053828

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