Advanced mechatronics and MEMS devic...
Wei, Bin.

 

  • Advanced mechatronics and MEMS devices.. II
  • Record Type: Language materials, printed : Monograph/item
    Title/Author: Advanced mechatronics and MEMS devices./ edited by Dan Zhang, Bin Wei.
    other author: Zhang, Dan.
    Published: Cham :Springer International Publishing : : 2017.,
    Description: xvii, 718 p. :ill., digital ; : 24 cm.;
    Contained By: Springer eBooks
    Subject: Microelectromechanical systems. -
    Online resource: http://dx.doi.org/10.1007/978-3-319-32180-6
    ISBN: 9783319321806
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