Microelectromechanical systems.

Overview
Works: 125 works in 52 publications in 52 languages
Titles
The MEMS handbook by: (Language materials, printed)
Principles and Applications of NanoMEMS Physics by: (Language materials, printed)
The MEMS handbook by: (Language materials, printed)
BioNanoFluidic MEMS by: (Language materials, printed)
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