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Photonic MEMS devices : = design, fa...

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Liu, Ai-Qun.

Photonic MEMS devices : = design, fabrication and control /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Photonic MEMS devices :/ Ai-Qun Liu ... [et al.].
Reminder of title:	design, fabrication and control /
Author:	Liu, Ai-Qun.
Published:	Boca Raton, Fla. :CRC Press, : 2009.,
Description:	483 p. :ill. ; : 27 cm.;
Subject:	Microelectromechanical systems. -
Online resource:	http://www.crcnetbase.com/doi/book/10.1201/9781420045710
ISBN:	9781420045680

Photonic MEMS devices : = design, fabrication and control /
Liu, Ai-Qun.

Photonic MEMS devices :design, fabrication and control /Ai-Qun Liu ... [et al.]. - Boca Raton, Fla. :CRC Press,2009. - 483 p. :ill. ;27 cm. - Optical science and engineering series ;136. - Optical science and engineering (Boca Raton, Fla.)..

Includes bibliographical references.

ISBN: 9781420045680Subjects--Topical Terms:

559134
Microelectromechanical systems.

LC Class. No.: TK7875 / .L58 2009

Dewey Class. No.: 621.381

Photonic MEMS devices : = design, fabrication and control /
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003 FlBoTFG
005 20090601130545.0
008 110106s2009 flua b 000 0 eng
020 $a 9781420045680
035 $a CRC00045687000
040 $a UtOrBLW $c UtOrBLW $d FlBoTFG
050 4 $a TK7875 $b .L58 2009
082 0 0 $a 621.381
092 $a 621.381 $b L783
100 1 $a Liu, Ai-Qun. $3 761140
245 1 0 $a Photonic MEMS devices : $b design, fabrication and control / $c Ai-Qun Liu ... [et al.].
260 $a Boca Raton, Fla. : $b CRC Press, $c 2009.
300 $a 483 p. : $b ill. ; $c 27 cm.
490 1 $a Optical science and engineering series ; $v 136
504 $a Includes bibliographical references.
530 $a Also available as an electronic resource. $b CRC Press (http://www.crcpress.com)
650 0 $a Microelectromechanical systems. $3 559134
650 0 $a Photonics. $3 562392
830 0 $a Optical science and engineering (Boca Raton, Fla.). $3 761141
856 4 0 $3 Publisher description $u http://www.crcnetbase.com/doi/book/10.1201/9781420045710
945 $a BRFL - 001 and 003 fields altered to contain TFG custom control number - 2010/03/12

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