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Photonic MEMS devices : = design, fa...
~
Liu, Ai-Qun.
Photonic MEMS devices : = design, fabrication and control /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Photonic MEMS devices :/ Ai-Qun Liu ... [et al.].
其他題名:
design, fabrication and control /
作者:
Liu, Ai-Qun.
出版者:
Boca Raton, Fla. :CRC Press, : 2009.,
面頁冊數:
483 p. :ill. ; : 27 cm.;
標題:
Microelectromechanical systems. -
電子資源:
http://www.crcnetbase.com/doi/book/10.1201/9781420045710
ISBN:
9781420045680
Photonic MEMS devices : = design, fabrication and control /
Liu, Ai-Qun.
Photonic MEMS devices :
design, fabrication and control /Ai-Qun Liu ... [et al.]. - Boca Raton, Fla. :CRC Press,2009. - 483 p. :ill. ;27 cm. - Optical science and engineering series ;136. - Optical science and engineering (Boca Raton, Fla.)..
Includes bibliographical references.
ISBN: 9781420045680Subjects--Topical Terms:
559134
Microelectromechanical systems.
LC Class. No.: TK7875 / .L58 2009
Dewey Class. No.: 621.381
Photonic MEMS devices : = design, fabrication and control /
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