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Analysis and design principles of MEMS devices

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Analysis and design principles of MEMS devices/ by Minhang Bao.
Author:	Bao, Min-Hang.
Published:	Amsterdam ;Elsevier, : 2005.,
Description:	xii, 312 p. :ill. ; : 25 cm.;
Subject:	Microelectromechanical systems. -
Online resource:	An electronic book accessible through the World Wide Web; click for information
Online resource:	An electronic book accessible through the World Wide Web; click for information
ISBN:	9780444516169

Analysis and design principles of MEMS devices
Bao, Min-Hang.

Analysis and design principles of MEMS devices[electronic resource] /by Minhang Bao. - Amsterdam ;Elsevier,2005. - xii, 312 p. :ill. ;25 cm.

Includes bibliographical references and index.

Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing.

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

Electronic reproduction.
Amsterdam :
Elsevier Science & Technology,
2007.

Mode of access: World Wide Web.

ISBN: 9780444516169

Source: 104495:104517Elsevier Science & Technologyhttp://www.sciencedirect.comSubjects--Topical Terms:

559134
Microelectromechanical systems.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7875 / .B36 2005eb

Dewey Class. No.: 621.381

Analysis and design principles of MEMS devices
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504 $a Includes bibliographical references and index.
505 0 $a Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing.
520 $a Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
533 $a Electronic reproduction. $b Amsterdam : $c Elsevier Science & Technology, $d 2007. $n Mode of access: World Wide Web. $n System requirements: Web browser. $n Title from title screen (viewed on July 25, 2007). $n Access may be restricted to users at subscribing institutions.
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