Advanced mechatronics and MEMS devices
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  • Advanced mechatronics and MEMS devices
  • Record Type: Language materials, printed : Monograph/item
    Title/Author: Advanced mechatronics and MEMS devices/ edited by Dan Zhang.
    other author: Zhang, Dan.
    Published: New York, NY :Springer New York : : 2013.,
    Description: xi, 249 p. :ill., digital ; : 24 cm.;
    Contained By: Springer eBooks
    Subject: Microelectromechanical systems. -
    Online resource: http://dx.doi.org/10.1007/978-1-4419-9985-6
    ISBN: 9781441999856 (electronic bk.)
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