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Silicon carbide microsystems for har...
~
Wijesundara, Muthu B.J.
Silicon carbide microsystems for harsh environments
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Silicon carbide microsystems for harsh environments/ by Muthu B.J. Wijesundara, Robert G. Azevedo.
Author:
Wijesundara, Muthu B.J.
other author:
Azevedo, Robert G.
Published:
New York, NY :Springer Science+Business Media, LLC, : 2011.,
Description:
xv, 232 p. :ill., digital ; : 24 cm.;
Series:
MEMS reference shelf,
Contained By:
Springer eBooks
Subject:
Microelectromechanical systems. -
Online resource:
http://dx.doi.org/10.1007/978-1-4419-7121-0
ISBN:
9781441971210 (electronic bk.)
Silicon carbide microsystems for harsh environments
Wijesundara, Muthu B.J.
Silicon carbide microsystems for harsh environments
[electronic resource] /by Muthu B.J. Wijesundara, Robert G. Azevedo. - New York, NY :Springer Science+Business Media, LLC,2011. - xv, 232 p. :ill., digital ;24 cm. - MEMS reference shelf,221936-4407 ;.
ISBN: 9781441971210 (electronic bk.)Subjects--Topical Terms:
559134
Microelectromechanical systems.
LC Class. No.: TK7875 / .W55 2011
Dewey Class. No.: 621.381
Silicon carbide microsystems for harsh environments
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by Muthu B.J. Wijesundara, Robert G. Azevedo.
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Engineering (Springer-11647)
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