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Piezoelectric MEMS resonators

Bhugra, Harmeet.

Piezoelectric MEMS resonators

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Piezoelectric MEMS resonators/ edited by Harmeet Bhugra, Gianluca Piazza.
other author:	Bhugra, Harmeet.
Published:	Cham :Springer International Publishing : : 2017.,
Description:	xii, 424 p. :ill., digital ; : 24 cm.;
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/978-3-319-28688-4
ISBN:	9783319286884

Piezoelectric MEMS resonators
Piezoelectric MEMS resonators[electronic resource] /edited by Harmeet Bhugra, Gianluca Piazza. - Cham :Springer International Publishing :2017. - xii, 424 p. :ill., digital ;24 cm. - Microsystems and nanosystems,2198-0063. - Microsystems and nanosystems..

AIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication.

ISBN: 9783319286884

Standard No.: 10.1007/978-3-319-28688-4doiSubjects--Topical Terms:

559134
Microelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Piezoelectric MEMS resonators
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020 $a 9783319286860 $q (paper)
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245 0 0 $a Piezoelectric MEMS resonators $h [electronic resource] / $c edited by Harmeet Bhugra, Gianluca Piazza.
260 $a Cham : $c 2017. $b Springer International Publishing : $b Imprint: Springer,
300 $a xii, 424 p. : $b ill., digital ; $c 24 cm.
490 1 $a Microsystems and nanosystems, $x 2198-0063
505 0 $a AIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication.
650 0 $a Microelectromechanical systems. $3 559134
650 0 $a Piezoelectric devices. $3 599532
650 1 4 $a Engineering. $3 561152
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 670219
650 2 4 $a Nanotechnology and Microengineering. $3 722030
650 2 4 $a Nanotechnology. $3 557660
650 2 4 $a Optical and Electronic Materials. $3 593919
700 1 $a Bhugra, Harmeet. $3 1250497
700 1 $a Piazza, Gianluca. $3 1250498
710 2 $a SpringerLink (Online service) $3 593884
773 0 $t Springer eBooks
830 0 $a Microsystems and nanosystems. $3 1063276
856 4 0 $u http://dx.doi.org/10.1007/978-3-319-28688-4
950 $a Engineering (Springer-11647)

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