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Piezoelectric MEMS resonators

Bhugra, Harmeet.

Piezoelectric MEMS resonators

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Piezoelectric MEMS resonators/ edited by Harmeet Bhugra, Gianluca Piazza.
其他作者:	Bhugra, Harmeet.
出版者:	Cham :Springer International Publishing : : 2017.,
面頁冊數:	xii, 424 p. :ill., digital ; : 24 cm.;
Contained By:	Springer eBooks
標題:	Microelectromechanical systems. -
電子資源:	http://dx.doi.org/10.1007/978-3-319-28688-4
ISBN:	9783319286884

Piezoelectric MEMS resonators
Piezoelectric MEMS resonators[electronic resource] /edited by Harmeet Bhugra, Gianluca Piazza. - Cham :Springer International Publishing :2017. - xii, 424 p. :ill., digital ;24 cm. - Microsystems and nanosystems,2198-0063. - Microsystems and nanosystems..

AIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication.

ISBN: 9783319286884

Standard No.: 10.1007/978-3-319-28688-4doiSubjects--Topical Terms:

559134
Microelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Piezoelectric MEMS resonators
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505 0 $a AIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication.
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