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Adhesion aspects in MEMS-NEMS
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Adhesion aspects in MEMS-NEMS/ edited by S.H. Kim, M.T. Dugger and K.L. Mittal.
other author:
Kim, Seong H.
Published:
Leiden ;Vsp, : c2010,
Description:
1 online resource (xi, 409 p.) :ill. :
Notes:
Includes bibliographical references.
Subject:
Microelectromechanical systems. -
Online resource:
https://www.taylorfrancis.com/books/9780429087929
ISBN:
9004190953 (electronic bk.)
Adhesion aspects in MEMS-NEMS
Adhesion aspects in MEMS-NEMS
[electronic resource] /edited by S.H. Kim, M.T. Dugger and K.L. Mittal. - Leiden ;Vsp,c2010 - 1 online resource (xi, 409 p.) :ill.
Includes bibliographical references.
ISBN: 9004190953 (electronic bk.)Subjects--Topical Terms:
559134
Microelectromechanical systems.
Index Terms--Genre/Form:
554714
Electronic books.
LC Class. No.: TK7875 / .A34 2010
Dewey Class. No.: 621.381
Adhesion aspects in MEMS-NEMS
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9004190953 (electronic bk.)
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Adhesion aspects in MEMS-NEMS
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[electronic resource] /
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edited by S.H. Kim, M.T. Dugger and K.L. Mittal.
260
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Leiden ;
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Boston :
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Vsp,
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c2010
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1 online resource (xi, 409 p.) :
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ill.
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Includes bibliographical references.
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Description based on print version record.
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Microelectromechanical systems.
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Kim, Seong H.
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Dugger, M. T.
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(Michael T.)
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Mittal, K. L.,
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https://www.taylorfrancis.com/books/9780429087929
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